Nano-electrode-array for integrated circuit interconnects
View Patent ↗An integrated circuit and a method of manufacturing an integrated circuit is provided including providing an integrated circuit having a trench and via provided in a dielectric layer. A nano-electrode-array is formed over the dielectric layer in the trench and via, and a conductor is deposited over the nano-electrode-array. The conductor and the nano-electrode-array are coplanar with a surface of the dielectric layer.
1. A method of manufacturing an integrated circuit comprising:
providing an integrated circuit having a trench and via provided in a dielectric layer;
forming a self-assembly monolayer on the dielectric layer in the trench and via;
forming a nano-electrode-array over the dielectric layer in the trench and via;
forming the nano-electrode-array at least partially embedded in the self-assembly monolayer
depositing a conductor over the nano-electrode-array; and
planarizing the conductor and the nano-electrode-array to be coplanar with a surface of the dielectric layer.
2. The method of manufacturing an integrated circuit as claimed in claim 1 further comprising:
depositing a barrier layer on the dielectric layer in the trench and via; and
forming the nano-electrode-array on the barrier layer.
3. The method of manufacturing an integrated circuit as claimed in claim 1 further comprising:
removing the self-assembly monolayer; and
forming the nano-electrode-array on the dielectric layer from which the self-assembly monolayer has been removed.
4. The method of manufacturing an integrated circuit as claimed in claim 1 further comprising:
depositing a metallization on the nano-electrode array.
5. A method of manufacturing an integrated circuit comprising:
providing an integrated circuit having a trench and via provided in a dielectric layer;
forming a self-assembly monolayer having a radical or tether connection to the dielectric layer in the trench and via, the dielectric layer being of a porous low dielectric constant material;
forming a nano-electrode-array for a double layer diffusion by activation or electroless deposition over the dielectric layer in the trench and via;
forming the nano-electrode-array at least partially embedded in the self-assembly monolayer;
depositing a conductor by electroless deposition or electroplating over the nano-electrode-array; and
planarizing the conductor and the nano-electrode-array by electrochemical, chemical, or chemical-mechanical polishing to be coplanar with a surface of the dielectric layer.
6. The method of manufacturing an integrated circuit as claimed in claim 5 further comprising:
depositing a barrier layer on the dielectric layer in the trench and via; and
forming the nano-electrode-array on the barrier layer; and
depositing the conductor on the nano-electrode-array.
7. The method of manufacturing an integrated circuit as claimed in claim 5 further comprising:
removing at least one of the radical, the tether connection, the self-assembly monolayer, or the combination thereof from the dielectric layer; and
forming the nano-electrode-array on the dielectric layer.
8. The method of manufacturing an integrated circuit as claimed in claim 5 further comprising:
depositing a metallization containing a barrier material on the nano-electrode array by electroless deposition.