IP Library Granted Patent US 7,073,388
Granted Patent B2
US 7,073,388 · App. 10/996,023 · Granted Jul 11, 2006

Variable capacitance measuring device comprising a glass-ceramic insulator

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Quick Facts
Patent No.
US 7,073,388
App. No.
10/996,023
Granted
Jul 11, 2006
Kind
B2
Abstract

A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. A shim may be used during the formation of the insulating material to reduce the likelihood of the insulator adhering to surfaces of the electrode portion during the manufacturing process. Also, separate bake-out and getter activation cycles may be combined into a single heat cycle.

Claims (27)

1. A method of forming a component for a variable capacitance measuring device comprising:

placing an insulating material between a ring and an electrode assembly;

crystallizing the insulating material to form a glass-ceramic material that contacts the ring and the electrode assembly;

attaching a diaphragm to the ring;

attaching the ring to a housing;

inserting a gettering material into the electrode assembly after heating the insulating material, wherein the glass-ceramic material surrounds a portion of the gettering material;

securing the gettering material so that it cannot fall out of the electrode assembly; and

activating the gettering material after crystallizing the insulating material.

2. The method of claim 1 , wherein heating is performed during a first portion at a first temperature higher than a flow point of the insulating material.

3. The method of claim 2 , wherein heating is performed during a second portion at a second temperature lower than the first temperature to form the crystals from the insulating material.

4. The method of claim 1 , further comprising:

placing a solid material between an electrode portion of the electrode assembly, wherein the insulating material substantially prevents the insulating material from contacting a first surface of the electrode portion.

5. The method of claim 1 , wherein the electrode portion has a first width and that solid material has a second width wider than the first width.

6. The method of claim 4 , further comprising attaching a diaphragm to the ring.

7. The method of claim 6 , further comprising attaching the ring to a housing.

8. The method of claim 7 , further comprising, inserting a gettering material into the electrode assembly after heating the insulating material.

9. The method of claim 8 , further comprising activating the gettering material.

10. The method of claim 8 , further comprising, securing the gettering material so that it cannot fall out of the electrode assembly.

11. The method of claim 10 , further comprising activating the gettering material.

12. The method of claim 1 , further comprising attaching a diaphragm to the ring.

13. The method of claim 1 , further comprising attaching the ring to a housing.

14. The method of claim 1 , further comprising, inserting a gettering material into the electrode assembly after heating the insulating material.

15. The method of claim 14 , further comprising activating the gettering material.

16. The method of claim 1 , further comprising, securing the gettering material so that it cannot fall out of the electrode assembly.

17. The method of claim 16 , further comprising activating the gettering material.

18. The method of claim 1 , further comprising inserting a gettering material into the electrode assembly.

19. The method of claim 18 , further comprising activating the gettering material.

Assignments (12)
RELEASE OF SECURITY INTEREST Recorded Jan 11, 2012
From: ALLY COMMERCIAL FINANCE LLC (F/K/A GMAC COMMERCIAL FINANCE LLC)
To: BROOKS INSTRUMENT, LLC
Reel/Frame 027514/0691 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, LLC; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND, LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0605 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: TENNENBAUM CAPITAL PARTNERS, LLC
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0624 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, L.L.C.; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0642 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: THE BANK OF NEW YORK MELLON; TPG PARTNERS III, L.P.; TPG INVESTORS III, L.P.; TPG DUTCH PARALELL III, C.V.; FOF PARTNERS III, L.P.; FOF PARTNERS III-B, L.P.; T3 GENPAR II, L.P.; T3 PARALLEL II, L.P.; TPG PARTNERS IV, L.P.; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0663 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 18, 2009
From: CELERITY, INC.
To: BROOKS INSTRUMENT, LLC
Reel/Frame 022835/0730 →
SECURITY INTEREST Recorded Jun 17, 2009
From: BROOKS INSTRUMENTS LLC
To: GMAC COMMERCIAL FINANCE LLC
Reel/Frame 022878/0786 →
SECURITY AGREEMENT Recorded Jun 5, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 021050/0279 →
SECURITY AGREEMENT Recorded May 27, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 020995/0403 →
SECURITY AGREEMENT Recorded Apr 16, 2008
From: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
To: THE BANK OF NEW YORK
Reel/Frame 020808/0538 →
MERGER Recorded May 17, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 017641/0556 →
ASSET PURCHASE AGREEMENT (REDACTED) Recorded May 17, 2006
From: ENTEGRIS, INC.
To: CELERITY, INC.
Reel/Frame 017641/0658 →