Patent Assignment
Reel/Frame 022878/0786
Security Interest
Recorded: 2009-06-17
Received: 2009-06-26
Pages: 15
Assignor
BROOKS INSTRUMENTS LLC
Executed: 2009-06-15
Assignee
GMAC COMMERCIAL FINANCE LLC
1290 AVENUE OF THE AMERICAS, NEW YORK, NY, 10104, UNITED STATES
Covered Properties
(56)
System for and Method of Providing a Wide-Range Flow Controller
Application:
12/249,821 →
Methods and Apparatus for Pressure Compensation in a Mass Flow Controller
Application:
12/233,405 →
Mass Flow Controller with Improved Dynamic
Application:
12/197,888 →
Thermal Flow Meter
Application:
12/193,584 →
Thermal Mass Flow Controller
Application:
61/080,270 →
Multi-Gas Flow Device
Application:
11/850,505 →
Methods and Apparatus for Pressure Compensation in a Mass Flow Controller
Application:
11/843,418 →
System and Method for a Mass Flow Controller
Application:
11/749,386 →
Attitude Insensitive Flow Device System and Method
Application:
11/788,201 →
Method and System for Wafer Temperature Control
Application:
11/664,550 →
Method and Apparatus for Providing a Determined Ratio of Process Fluids
Application:
11/651,231 →
Method and Apparatus for Providing a Determined Ratio of Process Fluids
Application:
11/504,175 →
Ultrasonic Flow Sensor Having Reflecting Interface
Application:
11/502,308 →
Mass Flow Meter or Controller with Inclination Sensor
Application:
11/377,911 →
System and Method of Operation of an Embedded System for a Digital Capacitance Diaphragm Gauge
Application:
11/369,885 →
System and Method for Producing and Delivering Vapor
Application:
11/349,068 →
System and Method for Measuring Flow
Application:
11/341,826 →
Digitally Controlled Sensor System
Application:
11/321,238 →
Method and Apparatus for Providing a Determined Ratio of Process Fluids
Application:
11/174,753 →
Methods and Apparatus for Pressure Compensation in a Mass Flow Controller
Application:
11/148,053 →
System and Method for Mass Flow Detection Device Calibration
Application:
11/129,166 →
System and Method for a Mass Flow Controller
Application:
11/092,144 →
System and Method for a Mass Flow Controller
Application:
11/091,824 →
Flow Sensor Signal Conversion
Application:
11/051,209 →
System and Method for Measuring Flow
Application:
11/012,750 →
Variable Capacitance Measuring Device Comprising a Glass-Ceramic Insulator
Application:
10/996,023 →
Slotted Flow Restrictor for a Mass Flow Meter
Application:
10/515,328 →
Variable Resistance Sensor with Common Reference Leg
Application:
10/978,156 →
Variable Capacitance Measuring Device
Application:
10/952,508 →
Method and System for Flow Measurement and Validation of a Mass Flow Controller
Application:
10/946,031 →
System and Method for Filtering Output in Mass Flow Controllers and Mass Flow Meters
Application:
10/926,860 →
Method and System for Flow Measurement and Validation of a Mass Flow Controller
Application:
10/887,591 →
Method and System for a Mass Flow Controller with Reduced Pressure Sensitivity
Application:
10/886,836 →
Attitude Insensitive Flow Device System and Method
Application:
10/887,048 →
Valve Control System and Method
Application:
10/887,040 →
Ultrasonic Liquid Flow Controller
Application:
10/878,974 →
Method for Digitally Controlling a Sensor System
Application:
10/848,739 →
Method and Apparatus for Providing a Determined Ratio of Process Fluids
Application:
10/832,949 →
Pressure Sensor Device and Method
Application:
10/827,026 →
Vacuum Sensor
Application:
10/468,413 →
Flow Sensor
Application:
10/623,147 →
Methods and Apparatus for Pressure Compensation in a Mass Flow Controller
Application:
10/622,080 →
Variable Resistance Sensor with Common Reference Leg
Application:
10/622,004 →
System and Method for Mass Flow Detection Device Calibration
Application:
10/444,249 →
Flow Sensor Signal Conversion
Application:
10/400,149 →
Variable Capacitance Measuring Device
Application:
10/178,170 →
Electronic Interface for Use with Dual Electrode Capacitance Diaphragm Gauges
Application:
10/064,136 →
Temperature Regulator for Use with a Pressure Sensing Device
Application:
10/064,137 →
System and Method of Operation of an Embedded System for a Digital Capacitance Diaphragm Gauge
Application:
10/063,991 →
Method and Apparatus for Providing a Determined Ratio of Process Fluids
Application:
10/154,433 →
System and Method for a Mass Flow Controller
Application:
10/131,603 →
System and Method of Operation of a Digital Mass Flow Controller
Application:
10/068,052 →
System and Method for a Digital Mass Flow Controller
Application:
10/062,080 →
System and Method of Operation of a Digital Mass Flow Controller
Application:
10/006,774 →
Pendulum Valve with a Full Range of Position Control
Application:
09/952,083 →
Method and Apparatus for Balancing Resistance
Application:
09/783,439 →