IP Library Granted Patent US 7,150,201
Granted Patent B2
US 7,150,201 · App. 11/012,750 · Granted Dec 19, 2006

System and method for measuring flow

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,150,201
App. No.
11/012,750
Granted
Dec 19, 2006
Kind
B2
Abstract

One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.

Claims (241)

1. A system of determining a flow rate of a fluid comprising:

a constant volume chamber;

a sonic nozzle in fluid communication with the constant volume chamber;

one or more valves configured to direct a flow of a fluid to the constant volume chamber and the sonic nozzle;

sensors configured to read one or more parameters of the fluid; and

a controller coupled to the sensors configured to receive measurements from the sensors, the controller comprising:

a processor;

a memory accessible by the processor, the memory storing a set of computer instructions comprising instructions executable by the processor to:

in a first mode of operation, calculate the flow rate as fluid accumulates in the constant volume chamber; and

in a second mode of operation, calculate the flow rate as the fluid flows through the sonic nozzle; and

switch between the first mode of operation and the second mode of operation after a delay to allow the constant volume chamber to equilibrate.

2. The system of claim 1 , wherein, in the first mode of operation, the flow rate is calculated based on the change in pressure over time of the fluid.

3. The system of claim 2 , wherein the flow rate is approximately calculated according to

m

t

=

P

t

V

RT

.

4. The system of claim 1 , wherein, in the second mode of operation, the flow rate is calculated based on a fluid pressure.

5. The system of claim 4 , wherein, in the second mode of operation, the flow rate is approximately calculated according to

massflowrate

=

PA

γ

RT

RT

.

6. The system of claim 1 , wherein, in the second mode of operation, the flow rate is calculated based on a fluid density.

7. The system of claim 6 , wherein, in the second mode of operation, the flow rate is approximately calculated according to

massflowrate

=

ρ

A

γ

RT

.

8. The system of claim 1 ,

wherein said one or more valves are further configured to regulate the flow through the system; and

wherein the computer instructions further comprise instructions executable to control said one or more valves to regulate the flow.

9. The system of claim 8 , wherein said one or more valves comprise:

a first valve downstream of the constant volume chamber; and

a second valve downstream of the sonic nozzle.

10. The system of claim 1 , wherein the flow rate comprises a mass flow rate.

11. The system of claim 1 , wherein the flow rate comprises a volumetric flow rate.

12. The system of claim 1 , wherein the computer instructions are executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.

13. The system of claim 1 , wherein the sonic nozzle is a variable orifice sonic nozzle.

14. A method of determining a flow rate of a fluid comprising:

for a first mode of operation, calculating the flow rate as fluid accumulates in a constant volume chamber for a first range of flow rates; and

for a second mode of operation, calculating the flow rate as the fluid flows through a sonic nozzle;

delaying to allow the constant volume chamber to equilibrate; and

switching between the first mode of operation and the second mode of operation.

15. The method of claim 14 , wherein, in the first mode of operation, the flow rate is calculated based on the change in pressure over time of the fluid.

16. The method of claim 15 , wherein, in the first mode of operation, the flow rate is approximately calculated according to

m

t

=

P

t

V

RT

.

17. The method of claim 14 , wherein, in the second mode of operation, the flow rate is calculated based on a fluid pressure.

18. The method of claim 17 , wherein, in the second mode of operation, the flow rate is approximately calculated according to

massflowrate

=

PA

γ

RT

RT

.

19. The method of claim 14 , wherein, in the second mode of operation, the flow rate is calculated based on a fluid density.

20. The method of claim 19 , wherein, in the second mode of operation, the flow rate is approximately calculated according to

massflowrate

=

ρ

A

γ

RT

.

21. The method of claim 14 , further comprising:

controlling one or more valves to regulate the flow to the constant volume chamber and sonic nozzle.

22. The method of claim 14 , wherein the flow rate comprises a mass flow rate.

23. The method of claim 14 , wherein the flow rate comprises a volumetric flow rate.

24. A system of determining a flow rate of a fluid comprising:

a constant volume chamber;

a sonic nozzle in fluid communication with the constant volume chamber;

one or more valves configured to direct a flow of a fluid to the constant volume chamber and the sonic nozzle;

sensors configured to read one or more parameters of the fluid; and

a controller coupled to the sensors configured to receive measurements from the sensors, the controller comprising:

a processor;

a memory accessible by the processor, the memory storing a set of computer instructions comprising instructions executable by the processor to:

in a first mode of operation, calculate the flow rate as fluid accumulates in the constant volume chamber; and

in a second mode of operation, calculate the flow rate as the fluid flows through the sonic nozzle;

switch between the first mode of operation and the second mode of operation;

calculate the flow rate according to the first mode of operation in an overlap range of flow rates; and

calculate a cross sectional area of the sonic nozzle based on the flow rate calculated according to the first mode of operation.

25. The system of claim 24 , wherein the cross sectional area of the sonic nozzle is approximately calculated according to

A

=

massflowrate

*

RT

P

γ

RT

.

26. The system of claim 24 , wherein the cross sectional area of the sonic nozzle is approximately calculated according to

massflowrate

=

ρ

A

γ

RT

.

27. A system of determining a flow rate of a fluid comprising:

a constant volume chamber;

a sonic nozzle in fluid communication with the constant volume chamber;

one or more valves configured to direct a flow of a fluid to the constant volume chamber and the sonic nozzle;

sensors configured to read one or more parameters of the fluid; and

a controller coupled to the sensors configured to receive measurements from the sensors, the controller comprising:

a processor;

a memory accessible by the processor, the memory storing a set of computer instructions comprising instructions executable by the processor to:

in a first mode of operation, calculate the flow rate as fluid accumulates in the constant volume chamber; and

in a second mode of operation, calculate the flow rate as the fluid flows through the sonic nozzle;

switch between the first mode of operation and the second mode of operation;

calculate the flow rate according to the first mode of operation in an overlap range; and

calculate a heat capacity ratio of the fluid based on the flow rate calculated according to the first mode of operation.

28. The system of claim 27 , wherein the heat capacity ratio is approximately calculated according to

γ

=

(

RT

*

massflowrate

PA

)

2

RT

.

29. The system of claim 27 , wherein the heat capacity ratio is approximately calculated according to

γ

=

(

massflowrate

ρ

A

)

2

RT

.

30. A method of determining a flow rate of a fluid comprising:

for a first mode of operation, calculating the flow rate as fluid accumulates in a constant volume chamber for a first range of flow rates; and

for a second mode of operation, calculating the flow rate as the fluid flows through a sonic nozzle;

switching between the first mode of operation and the second mode of operation;

calculating the flow rate according to the first mode of operation in an overlap range of flow rates; and

calculating a cross sectional area of the sonic nozzle based on the flow rate calculated according to the first mode of operation.

31. The method of claim 30 , wherein the sonic nozzle is a variable orifice sonic nozzle.

32. The method of claim 30 , wherein the cross sectional area of the sonic nozzle is approximately calculated according to

A

=

massflowrate

*

RT

P

γ

RT

.

33. A method of determining a flow rate of a fluid comprising:

for a first mode of operation, calculating the flow rate as fluid accumulates in a constant volume chamber for a first range of flow rates; and

for a second mode of operation, calculating the flow rate as the fluid flows through a sonic nozzle;

switching between the first mode of operation and the second mode of operation

calculating the flow rate according to the first mode of operation in an overlap range; and

calculating a heat capacity ratio of the fluid based on a the flow rate calculated according to the first mode of operation.

34. The method of claim 33 , wherein the heat capacity ratio is approximately calculated according to

γ

=

(

RT

*

massflowrate

PA

)

2

RT

.

35. The method of claim 33 , wherein the heat capacity ratio is

approximately calculated according to

γ

=

(

massflowrate

ρ

A

)

2

RT

.

Assignments (13)
RELEASE OF SECURITY INTEREST Recorded Jan 11, 2012
From: ALLY COMMERCIAL FINANCE LLC (F/K/A GMAC COMMERCIAL FINANCE LLC)
To: BROOKS INSTRUMENT, LLC
Reel/Frame 027514/0691 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, LLC; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND, LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0605 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: TENNENBAUM CAPITAL PARTNERS, LLC
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0624 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, L.L.C.; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0642 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: THE BANK OF NEW YORK MELLON; TPG PARTNERS III, L.P.; TPG INVESTORS III, L.P.; TPG DUTCH PARALELL III, C.V.; FOF PARTNERS III, L.P.; FOF PARTNERS III-B, L.P.; T3 GENPAR II, L.P.; T3 PARALLEL II, L.P.; TPG PARTNERS IV, L.P.; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0663 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 18, 2009
From: CELERITY, INC.
To: BROOKS INSTRUMENT, LLC
Reel/Frame 022835/0730 →
SECURITY INTEREST Recorded Jun 17, 2009
From: BROOKS INSTRUMENTS LLC
To: GMAC COMMERCIAL FINANCE LLC
Reel/Frame 022878/0786 →
SECURITY AGREEMENT Recorded Jun 5, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 021050/0279 →
SECURITY AGREEMENT Recorded May 27, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 020995/0403 →
SECURITY AGREEMENT Recorded Apr 16, 2008
From: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
To: THE BANK OF NEW YORK
Reel/Frame 020808/0538 →
MERGER Recorded Jun 7, 2006
From: MYKROLIS CORPORATION
To: ENTEGRIS, INC.
Reel/Frame 017752/0974 →
ASSET PURCHASE AGREEMENT (REDACTED) Recorded Jun 7, 2006
From: ENTEGRIS, INC.
To: CELERITY, INC.
Reel/Frame 017753/0087 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2004
From: TISON, STUART A.; LU, SHILIANG
To: MYKROLIS CORPORATION
Reel/Frame 016092/0667 →