IP Library Granted Patent US 7,636,640
Granted Patent B2
US 7,636,640 · App. 11/850,505 · Granted Dec 22, 2009

Multi-gas flow device

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Quick Facts
Patent No.
US 7,636,640
App. No.
11/850,505
Granted
Dec 22, 2009
Kind
B2
Abstract

A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.

Claims (89)

1. A flow sensor comprising:

a bypass with a plurality of bypass tubes;

a sensor conduit in fluid communication with the bypass;

a sensor assembly operatively coupled to the sensor conduit to generate a measured signal representative of a flow rate of a fluid through the sensor conduit; and

a processor operatively configured to receive the measured signal and to generate a flow rate representation based at least partially on the measured signal and a characteristic function of the flow sensor, the characteristic function at least partially defined by a dynamic pressure of fluid flowing through the bypass and further based on a bypass bias function, wherein the bypass bias function is based on a ratio of dynamic pressure of a fluid flowing through the bypass relative to a measured dynamic pressure of a calibration gas flowing through the bypass.

2. The flow sensor of claim 1 , wherein the characteristic function is further defined by a Reynolds number of the fluid flowing through the bypass.

3. The flow sensor of claim 2 , wherein the characteristic function is further defined by a ratio of the dynamic pressure to the pressure drop across the bypass.

4. The flow sensor of claim 3 , wherein the characteristic function is further defined by a product of the Reynolds number and an aspect ratio of the bypass.

5. The flow sensor of claim 1 , wherein the bypass bias function is further based on a ratio of a pressure drop of the fluid flowing through the flow sensor to a measured pressure drop of the calibration gas flowing through the flow sensor.

6. The flow sensor of claim 5 , wherein the bypass bias function is at least partially defined by a polynomial function F B =(a 0 +a 1 X+a 2 X 2 +a 3 X 3 ), wherein a 0 , a 1 , a 2 , and a 3 are bypass bias function coefficients defined during flow of the calibration gas through the flow sensor and X is a product of the Reynolds number of the fluid flowing through the bypass and a ratio of the inside diameter to the length of the bypass tubes.

7. The flow sensor of claim 6 , further comprising a storage device operatively coupled to the circuit and comprising a plurality of bypass bias coefficients.

8. A flow sensor comprising:

a bypass with a plurality of bypass tubes;

a sensor conduit in fluid communication with the bypass;

a sensor assembly operatively coupled to the sensor conduit to generate a measured signal representative of a flow rate of a fluid through the sensor conduit; and

a processor operatively configured to receive the measured signal and to generate a flow rate representation based at least partially on the measured signal and a characteristic function of the flow sensor, the characteristic function at least partially defined by a dynamic pressure of fluid flowing through the bypass and at least partially based on the dimensionless number:

Re

(

D

L

)

=

ρ

U

D

μ

(

D

L

)

where Re is a Reynolds number of the fluid flowing through the bypass, ρ is the density of the fluid, μ is the viscosity of the fluid, U is the mean velocity of the fluid flowing through the bypass, D is the inside diameter of the bypass tubes, and L is the bypass tube length.

9. The flow sensor of claim 8 , wherein the characteristic function defines calibration curve defined by the relationship:

Q

Δ

P

=

G

(

Re

D

L

)

where

Q

=

1

2

(

ρ

U

2

)

 and ΔP is the pressure drop across the flow sensor.

10. The flow sensor of claim 9 , wherein the calibration curve is defined by the relationship:

(

Q

Δ

P

)

f

=

(

Q

Δ

P

)

c

·

F

B

where the bypass bias function is F B =(a 0 +a 1 X+a 2 X 2 +a 3 X 3 ), and a 0 , a 1 , a 2 , and a 3 are bypass bias function coefficients defined using a calibration gas and the subscripts f and c respectively denote values corresponding to the fluid and the calibration gas.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Jan 11, 2012
From: ALLY COMMERCIAL FINANCE LLC (F/K/A GMAC COMMERCIAL FINANCE LLC)
To: BROOKS INSTRUMENT, LLC
Reel/Frame 027514/0691 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, LLC; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND, LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0605 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: TENNENBAUM CAPITAL PARTNERS, LLC
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.
Reel/Frame 022846/0624 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: OBSIDIAN, LLC; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP; SPCP GROUP, L.L.C.; NEW YORK LIFE INVESTMENT MANAGEMENT MEZZANINE PARTNERS, LP; NYLIM MEZZANINE PARTNERS PARALLEL FUND LP; UNITED INSURANCE COMPANY OF AMERICA; TRINITY UNIVERSAL INSURANCE COMPANY
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0642 →
RELEASE OF SECURITY INTEREST Recorded Jun 19, 2009
From: THE BANK OF NEW YORK MELLON; TPG PARTNERS III, L.P.; TPG INVESTORS III, L.P.; TPG DUTCH PARALELL III, C.V.; FOF PARTNERS III, L.P.; FOF PARTNERS III-B, L.P.; T3 GENPAR II, L.P.; T3 PARALLEL II, L.P.; TPG PARTNERS IV, L.P.; SPECIAL VALUE ABSOLUTE RETURN FUND, LLC; SPECIAL VALUE CONTINUATION PARTNERS, LP
To: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
Reel/Frame 022846/0663 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 18, 2009
From: CELERITY, INC.
To: BROOKS INSTRUMENT, LLC
Reel/Frame 022835/0730 →
SECURITY INTEREST Recorded Jun 17, 2009
From: BROOKS INSTRUMENTS LLC
To: GMAC COMMERCIAL FINANCE LLC
Reel/Frame 022878/0786 →
SECURITY AGREEMENT Recorded Jun 5, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 021050/0279 →
SECURITY AGREEMENT Recorded May 27, 2008
From: CELERITY, INC.
To: OBSIDIAN, LLC
Reel/Frame 020995/0403 →
SECURITY AGREEMENT Recorded Apr 16, 2008
From: CELERITY, INC.; CELERITY HOLDING COMPANY, INC.; CELERITY SYSTEMS, INC.
To: THE BANK OF NEW YORK
Reel/Frame 020808/0538 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 15, 2007
From: WANG, CHIUN; LULL, JOHN M.; VALENTINE, WILLIAM S.
To: CELERITY, INC.
Reel/Frame 020120/0287 →