Acoustic resonators
View Patent ↗An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer provided on the primer layer, and a piezoelectric layer provided on the electrode layer. The primer layer, or at least one of the primer layers, has a crystallographic structure belonging to a first crystal system, and the electrode layer has a crystallographic structure belonging to a second crystal system which is different to the first system. The atomic spacing of the primer layer or at least one of said primer layers and that of the electrode matches to within about 15%.
1. A resonator comprising: a substrate; an acoustic mirror on said substrate; a primer layer portion comprising Aluminum Nitride on said acoustic mirror; a bottom electrode on said primer layer; piezoelectric portion on said bottom electrode; and a top electrode on said piezoelectric portion.
2. The resonator as recited in claim 1 wherein said primer layer portion has a thickness of less than 2,000 Angstroms.
3. The resonator as recited in claim 1 wherein said piezoelectric portion comprises Aluminum Nitride.
4. The resonator as recited in claim 1 wherein said piezoelectric portion comprises Aluminum Nitride, and said bottom electrode and said top electrode comprises Molybdenum.
5. The resonator recited in claim 2 wherein said piezoelectric portion comprises Aluminum Nitride, and said bottom electrode and said top electrode comprises Molybdenum.
6. A method of fabricating a resonator, the method comprising: fabricating an acoustic mirror on a substrate; fabricating a primer layer comprising Aluminum Nitride on said acoustic mirror; fabricating a bottom electrode on said primer layer; fabricating piezoelectric portion on said bottom electrode; and fabricating a top electrode on said piezoelectric portion.
7. The method as recited in claim 6 wherein said primer layer is formed to have a thickness of less than 2,000 Angstroms.
8. The method as recited in claim 6 wherein said piezoelectric portion is formed to comprise Aluminum Nitride.
9. The method as recited in claim 6 wherein said piezoelectric portion is formed to comprise Aluminum Nitride, and said bottom electrode and said top electrode are formed to comprise Molybdenum.
10. The method as recited in claim 7 wherein said piezoelectric portion is formed to comprise Aluminum Nitride, and said bottom electrode and said top electrode are formed to comprise Molybdenum.