Semiconductor device, semiconductor substrate and fabrication process of a semiconductor device
View Patent ↗A semiconductor device includes a first insulation layer including a first conductor pattern, a second insulation layer formed on the first insulation layer and including a second conductor pattern, and a third conductor pattern formed on the second insulation layer, wherein there is formed a first alignment mark part in the first insulation layer by a part of the first conductor pattern, the third conductor pattern is formed with a second alignment mark part corresponding to the first alignment mark part, the first and second alignment marks forming a mark pair for detecting alignment of the first conductor pattern and the third conductor pattern, the second conductor pattern being formed in the second insulation layer so as to avoid the first alignment mark part.
1. A method of fabricating a semiconductor device, comprising the step of forming, on a layered structure of a first insulation film including a first conductor pattern and a second insulation film formed on said first insulation film and including a second conductor pattern, a third conductor pattern,
said method comprising the steps of:
measuring a first alignment error between said first conductor pattern and said second conductor pattern;
measuring a second alignment error between said second conductor pattern and said third conductor pattern,
patterning said third conductor pattern on said insulation film by an etching process,
measuring a third alignment error between said third conductor pattern and said first conductor pattern by monitoring said third conductor pattern and an alignment mark included in said first insulation film; and
obtaining a corrected alignment error in which said second alignment error is corrected based on said first and third alignment errors.
2. The method as claimed in claim 1 , wherein said first through third alignment errors being obtained for a pilot substrate processed in advance to fabrication of a semiconductor device, and
wherein an alignment error of said third conductor pattern with regard to said second conductor pattern is corrected by said corrected alignment error at the time of production of said semiconductor device.
3. The method as claimed in claim 1 , wherein said step of forming said third conductor pattern by etching includes the step of forming an alignment mark pattern aligned with regard to said first conductor pattern through said second insulation film.
4. The method as claimed in claim 1 , wherein said step of measuring said second alignment error includes the step of measuring an alignment error between a depression formed on a surface of said third conductor pattern in correspondence to a first alignment opening formed in said second insulation film and a second alignment opening formed in said third conductor pattern by an etching process so as to be included in said first alignment opening.