Flip-chip light emitting diode and method of manufacturing the same
View Patent ↗Provided are a flip-chip light emitting diode (FCLED) and a method of manufacturing the same. The provided FCLED is formed by sequentially depositing an n-type cladding layer, an active layer, a p-type cladding layer, and a reflective layer on a substrate. The reflective layer is formed of the alloy of silver to which a solute element is added. According to the provided FCLED and the method of manufacturing the same, a thermal stability is improved to improve an ohmic contact characteristic to a p-type cladding layer, thus a wire bonding efficiency and a yield are improved when packaging the provided FCLED. In addition, the light emitting efficiency and the lifespan of the provided FCLED are improved due to a low specific-contact resistance and an excellent current-voltage characteristic.
1. A flip-chip light emitting diode (FCLED) having an active layer interposed between an n-type cladding layer and a p-type cladding layer, the FCLED comprising a reflective layer formed of a solute element added silver (Ag) on the p-type cladding layer, wherein the solute element is at least one selected from the group consisting of aluminum (Al), palladium (Pd), copper (Cu), chrome (Cr), zinc (Zn), rhodium (Rh), nickel (Ni), indium (In), tin (Sn), cobalt (Co), magnesium (Mg), ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au), plumbum (Pb), manganese (Mn), rhenium (Re), molybdenum (Mo), tungsten (W), vanadium (V), niobium (Nb), titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), scandium (Sc), yttrium (Y), beryllium (Be), and lanthanum (La) based elements.
2. A flip-chip light emitting diode (FCLED) having an active layer interposed between an n-type cladding layer and a p-type cladding layer, the FCLED comprising a reflective layer formed of a solute element added silver (Ag) on the p-type cladding layer, and further comprising an Ag agglomeration preventing layer (APL) formed on the reflective layer, and the Ag APL is formed of at least one selected from the group consisting of Ni, Ag, Zn, Mg, Pt, Cu, Pt, Ti, W, Mo, Ta, V, Re, alloys thereof, and titanium nitride (TiN).
3. A flip-chip light emitting diode (FCLED) having an active layer interposed between an n-type cladding layer and a p-type cladding layer, the FCLED comprising a reflective layer formed of a solute element added silver (Ag) on the p-type cladding layer, and further comprising a surface stabilization layer interposed between the reflective layer and the p-type cladding layer, wherein the surface stabilization layer is formed of any one selected from the group consisting of Ni; Zn; Cu; Mg, alloys of Ni, Zn, Cu, Mg; and a transparent conducting oxide formed of any one of In, Zn, Sn, Cu, Ag, Ga, and Cd.
4. The FCLED of claim 1 , further comprising a diffusion preventing layer formed of Ag between the reflective layer and the p-type cladding layer to prevent the solute element from diffusing to the surface of the p-type cladding layer when annealing the reflective layer.