Method of forming metal line in semiconductor device
View Patent ↗A method of forming a metal line in a semiconductor device. The method includes forming an insulating interlayer over a substrate provided with a lower metal line, and forming a hole exposing the lower metal line. The method also includes forming a first metal layer on the insulating interlayer including an inside of the hole and the lower metal line, forming a conductor layer on the first metal layer to fill the hole, and etching back the conductor layer to form a plug until the first metal layer is exposed. The method further includes stacking a second metal layer and a third metal layer on the first metal layer, and patterning the second metal layer, the third metal layer, and the first metal layer to form an upper metal line overlapped with the plug using an etch mask defining the upper metal line.
1. A method of forming a metal line in a semiconductor device, comprising the steps of:
forming an insulating interlayer over a substrate provided with a lower metal line;
forming a hole exposing the lower metal line;
forming a first metal layer on the insulating interlayer including an inside of the hole and the lower metal line;
forming a conductor layer on the first metal layer to fill the hole;
etching back the conductor layer to form a plug and stopping the etching back when the first surface of metal layer is exposed;
sequentially stacking a second metal layer and a third metal layer on the first metal layer and the plug; and
patterning the second metal layer, the third metal layer, and the first metal layer to form an upper metal line overlapped with the plug using an etch mask defining the upper metal line.
2. The method of claim 1 , further comprising the step of removing the etch mask.
3. The method of claim 1 , wherein the first and third metal layers are formed of Ti or TiN.
4. The method of claim 1 , wherein the second metal layer is formed of aluminum.
5. The method of claim 1 , wherein the conductor layer is formed of tungsten.
6. The method of claim 1 , wherein the etching back step includes chemical mechanical polishing.