Method of fabricating flash memory device
View Patent ↗A method of fabricating a flash memory device is disclosed where a trench formation process and a wall oxide film formation process are performed separately depending on a pattern density, and wall oxide films are formed with different thicknesses. Accordingly, an increase in a thickness of the wall oxide films due to a smiling effect of tunnel oxide films by a wall oxidization process is prevented and reliability of a device can thus be improved.
1. A method of fabricating a flash memory device, comprising the steps of:
sequentially forming a tunnel oxide film, a polysilicon film and a hard mask film on a semiconductor substrate in which a first region where the gate size is small and a second region where the gate size is great are defined;
etching a predetermined region of the hard mask film, the polysilicon film and the tunnel oxide film in the second region, and then etching the semiconductor substrate at a given depth to form a first trench;
forming a first wall oxide film on the first trench;
forming a first insulating film on the entire surface so that the first trench is buried;
etching a predetermined region of the hard mask film, the polysilicon film and the tunnel oxide film in the first region, and then etching the semiconductor substrate at a given depth to form a second trench;
forming a second wall oxide film on the first trench;
forming a second insulating film on the entire surface so that the second trench is buried; and
polishing the first and second insulating films and then removing the hard mask film.
2. The method as claimed in claim 1 , comprising forming the first wall oxide film to be thicker than the second wall oxide film.
3. The method as claimed in claim 1 , comprising forming the first wall oxide film 30 Å to 60 Å in thickness, and forming the second wall oxide film 10 Å to 30 Å in thickness.
4. The method as claimed in claim 1 , comprising forming the first and second wall oxide films by a dry oxidization process at a temperature ranging from 750° C. to 850° C.
5. The method as claimed in claim 1 , wherein the first and second insulating film include a HDP oxide film.
6. A method of fabricating a flash memory device in which a plurality of trenches are formed on a semiconductor substrate, a plurality of wall oxide films are formed on the trenches, and the trenches are buried with an insulating film,
comprising forming the trenches by a different process depending on the pattern density, and forming the wall oxide films to be thicker in a region where the pattern density is coarse than in a region where the pattern density is dense.