Method for forming wall oxide layer and isolation layer in flash memory device
View Patent ↗Disclosed herein are methods for forming wall oxide films in flash memory devices and methods for forming isolation films. After trenches are formed in the substrate, an ISSG (In-Situ Steam Generation) oxidization process is performed to form wall oxide films on sidewalls of the trenches. This process prohibits formation of facets at the top and bottom edge portions of the trenches. Thus, the top edges of the trenches are rounded. Furthermore, the ISSG oxidization process is performed at a low temperature for a relatively short time. Therefore, thermal stress due to carrying out an oxidization process for a long time is reduced and a dislocation phenomenon is thus prevented from occurring.
1. A method for forming an isolation film in a flash memory device, comprising:
providing a semiconductor substrate in which a pad oxide film is formed;
depositing a pad nitride film on the pad oxide film;
etching the pad nitride film and the pad oxide film, and contemporaneously recessing some of a top of the semiconductor substrate to form first trenches;
forming spacers on the sidewalls of the first trenches;
performing a first oxidization process in a ISSG oxidization mode in a gas atmosphere comprising H 2 and O 2 , thereby oxidizing the top of the semiconductor substrate which is exposed between the spacers;
etching the semiconductor substrate through the first trenches to form second trenches;
performing a second oxidization process in a ISSG oxidization mode in a gas atmosphere comprising H 2 and O 2 , thus forming wall oxide films on sidewalls of the second trenches; and
forming an isolation film to fill the second trenches.
2. The method according to claim 1 , wherein the first and second oxidization processes are performed at a temperature ranging from 850 to 1000° C.
3. The method according to claim 2 , wherein the first and second oxidization processes are performed at a pressure ranging from 1 to 10 torr.
4. The method according to claim 1 , wherein the gas atmosphere comprising H 2 and O 2 has more O 2 than H 2 .
5. The method according to claim 4 , wherein in the gas atmosphere comprising H 2 and O 2 has a mixing ratio of O 2 of 33% to 60%.
6. The method according to claim 4 , wherein in the gas atmosphere comprising H 2 and O 2 has a mixing ratio of H 2 of 0.5% to 33%.
7. The method according to claim 1 , wherein the wall oxide films are formed with a thickness ranging from 15 to 30 Å.