Passivation of photonic integrated circuits (PICs)
View Patent ↗A photonic integrated circuit (PIC) comprises a plurality of integrated optically coupled components formed in a surface of the PIC and a passivating layer overlies at least a portion of the PIC surface. The overlying passivating layer comprises a material selected from the group consisting of BCB, ZnS and ZnSe. Also, when the circuits are PIC chips are die in the semiconductor wafer, a plurality of linear cleave streets are formed in a wafer passivation layer where a pattern of the cleave streets define separate PIC chips in the wafer for their subsequent singulation from the wafer.
1. An InP-based wavelength selective combiner/decombiner device having a passivation cladding layer overlying a surface of the device, characterized in that said passivation layer is selected from the group consisting of ZnS and ZnSe to reduce insertion loss of the device by minimizing a refractive index step between free-space regions of the device and the passivation cladding layer which is selected from said group; and an intermediate dielectric layer formed on said device surface and sandwiched between said surface and said passivation layer.
2. The InP-based wavelength selective combiner/decombiner device of claim 1 wherein said wavelength selective device is an arrayed wavelength grating (AWG), an Echelle grating or a cascaded Mach-Zehnder interferometer.
3. The photonic integrated circuit (PIC) of claim 1 wherein said intermediate layer comprises SiN x , SiO x or Si x ON y .
4. A photonic integrated circuit (PIC) comprising a plurality of integrated optically coupled components formed in a surface of said PIC, a passivation layer overlying at least a portion of the PIG surface, said passivation layer comprising a material selected from the group consisting of BCB, ZnS and ZnSe, an intermediate, silicon-containing dielectric layer formed between the PIC surface and said passivation layer and overlying the same portion of the PIC surface as said passivating layer.
5. The photonic integrated circuit (PIC) of claim 4 wherein said intermediate layer comprises SiN x , SiO x or SiO x N y .
6. The photonic integrated circuit (PIC) of claim 4 wherein said intermediate layer overlies a waveguide and monotonically changes in thickness over said waveguide for at least a portion of its longitudinal length.
7. The photonic integrated circuit (PIC) of claim 6 wherein said waveguide length portion is a transition region between said waveguide and a free space region.
8. A photonic integrated circuit (PIC) comprising a plurality of integrated optically coupled components formed in a surface of said PIC, a first passivation layer overlying at least a portion of the PIC surface and comprising a dielectric material selected from the group consisting of SiN x , SiO x or SiO x N y , a second passivation layer overlying said first passivation layer and comprising a material selected from the group consisting of BCB, ZnS and ZnSe.
9. The photonic integrated circuit (PIC) of claim 8 further comprising a plurality of alternating layers of said first and second passivation layers formed over said PIC surface.
10. The photonic integrated circuit (PIC) of claim 8 further comprising a beater formed over a portion of said second passivation layer.