Laser induced thermal imaging apparatus
View Patent ↗A laser induced thermal imaging apparatus for fabricating an organic light emitting display is provided. The laser induced thermal imaging apparatus includes a stage where a substrate is positioned; a transport device for transporting a donor substrate; a laminator for laminating the substrate to the donor substrate; a laser optical unit for performing the LITI, and a chamber supplied with an atmospheric pressure of an inert gas in which the stage, the laminator, and the laser optical unit are positioned.
1. A laser induced thermal imaging (LITI) apparatus comprising:
a stage where a substrate is positioned, and movable in a constant direction;
a transport device for transporting a donor substrate;
a laminator for laminating the substrate to the donor substrate;
a laser optical unit for performing the LITI; and
a chamber supplied with an atmospheric pressure of an inert gas in which the stage, the laminator, and the laser optical unit are positioned.
2. The LITI apparatus as recited in claim 1 , wherein the atmospheric pressure of the inert gas contains a water vapor concentration of 10 ppm or less.
3. The LITI apparatus as recited in claim 1 , wherein the atmospheric pressure of the inert gas contains an oxygen concentration of 10 ppm or less.
4. The LITI apparatus as recited in claim 1 , wherein the stage where the substrate is transported and the donor substrate transport device are moved in directions different from each other.
5. The LITI apparatus as recited in claim 1 , wherein the donor substrate includes a transfer layer being a small molecular organic layer.
6. The LITI apparatus as recited in claim 1 , wherein the donor substrate includes a transfer layer being an emission layer.
7. The LITI apparatus as recited in claim 6 , wherein the donor substrate transport device is positioned to be discriminated in response to a color of the emission layer.
8. The LITI apparatus as recited in claim 7 , wherein each of the donor substrate transport devices is moved in a deposition device connected outside the LITI apparatus.
9. The LITI apparatus as recited in claim 8 , wherein the deposition device is positioned to be discriminated in response to each of red (R), green (G), and blue (B) colors of the emission layer.
10. The LITI apparatus as recited in claim 1 , wherein the laminator includes pressing means using a gas press, a crown press, or a roller.
11. A laser induced thermal imaging (LITI) apparatus comprising:
a stage where a substrate is positioned, and movable in a constant direction;
a transport device for transporting a donor substrate moving toward the stage in a direction different from that of the stage, and being positioned to be discriminated in response to each color of an emission layer;
a laminator for laminating the substrate to the donor substrate used for the LITI; and a laser optical unit for performing the LITI.
12. The LITI apparatus as recited in claim 11 , wherein the stage, the donor substrate transport device, and the laser optical unit are positioned within a chamber for supplying an atmospheric pressure of an inert gas.
13. The LITI apparatus as recited in claim 12 , wherein the atmospheric pressure of the inert gas contains a water vapor concentration of 10 ppm or less.
14. The LITI apparatus as recited in claim 12 , wherein the atmospheric pressure of the inert gas contains an oxygen concentration of 10 ppm or less.
15. The LITI apparatus as recited in claim 11 , wherein the donor substrate transport device moves toward the stage in a direction vertical to the stage.
16. The LITI apparatus as recited in claim 11 , wherein each of the donor substrate transport devices is moved in a deposition device connected outside the LITI apparatus.
17. The LITI apparatus as recited in claim 16 , wherein the deposition device is positioned to be discriminated in response to each of red (R), green (G), and blue (B) colors of the emission layer.