Laser irradiation apparatus and method of fabricating organic light emitting display using the same
View Patent ↗A laser irradiation apparatus and method of fabricating an organic light emitting display using the same are provided. The laser irradiation apparatus includes: a laser generator; a mask having means for changing a propagation path of a laser beam; and a projection lens. The method of fabricating an organic light emitting display includes: irradiating a laser beam on an edge of an irradiated region of a donor substrate using the laser irradiation apparatus with high intensity to form an organic layer pattern on a substrate. The laser beam having low intensity can perform a transfer process to improve laser beam efficiency. In addition, it is possible to reduce damage on the organic layer, and improve quality of the transferred organic layer pattern.
1. A laser irradiation apparatus comprising:
a laser generator;
a mask located under the laser generator and having a plurality of alternating convex portions and planar portions, the convex portions for changing a propagation path of a laser beam irradiated from the laser generator, and the planar portions for transmitting the laser beam; and
a projection lens located under the mask.
2. The laser irradiation apparatus according to claim 1 , wherein the convex portion is a lens.
3. The laser irradiation apparatus according to claim 2 , wherein the convex lens is formed at any one of a lower surface and an upper surface of the mask.
4. The laser irradiation apparatus according to claim 2 , wherein the convex lens is formed at lower and upper surfaces of the mask.
5. The laser irradiation apparatus according to claim 1 , wherein the convex portion is machined to have a lens shape.
6. The laser irradiation apparatus according to claim 1 , wherein the mask is made of a transparent material.
7. The laser irradiation apparatus according to claim 6 , wherein the transparent material is any one of glass and plastic.
8. The laser irradiation apparatus according to claim 1 , irradiating the laser beam in a step-and-step manner.
9. The laser irradiation apparatus according to claim 1 , wherein the laser beam irradiated from the laser generator passes through multiple convex portions.
10. A laser irradiation apparatus comprising:
a laser generator to generate a laser beam;
a transparent mask located under the laser generator and having first transparent regions alternately arranged with second transparent regions; and
a projection lens located under the mask,
wherein the laser beam straightly passes through the first transparent regions, the laser beam is refracted by the second transparent regions, and portions of the laser beam passing through the first transparent regions do not pass through the second transparent regions.
11. The laser irradiation apparatus according to claim 10 , wherein the first transparent regions have a uniform thickness and the second transparent regions have a varying thickness.
12. The laser irradiation apparatus according to claim 11 , wherein a maximum thickness of the second transparent regions exceeds a maximum thickness of the first transparent regions.
13. The laser irradiation apparatus according to claim 10 , wherein the transparent mask comprises glass.
14. The laser irradiation apparatus according to claim 10 , wherein the transparent mask comprises plastic.
15. The laser irradiation apparatus according to claim 10 , wherein the first transparent regions and the transparent second regions are integrally formed with each other.
16. The laser irradiation apparatus according to claim 10 , wherein the laser generator generates a single laser beam, the single laser beam passing through a plurality of first transparent regions and a plurality of second transparent regions.