Method of fabricating organic light emitting display
View Patent ↗A method of fabricating an organic light emitting display is provided. The method includes repeatedly scanning a laser beam over a predetermined region of a donor substrate with multi-lines in one step using a galvanometer to form an organic layer pattern. The method of the present invention is capable of reducing process time required to form the organic layer pattern and lowering manufacturing cost by repeating multi-line scanning in one step through the laser beam using the galvanometer, when the organic layer pattern is formed using an LITI method.
1. A method of fabricating an organic light emitting display, comprising:
providing a substrate having a pixel electrode;
laminating a donor substrate on an entire surface of the substrate; and
scanning a laser beam over a predetermined region on the donor substrate to form an organic layer pattern on the substrate,
wherein scanning the laser beam with multi-lines in one step using an x-galvanometer and a y-galvanometer is repeated.
2. The method according to claim 1 , wherein scanning the laser beam with multi-lines in one step comprises:
scanning the predetermined region of the donor substrate in an x-axis direction using the x-galvanometer; and
positioning the laser beam in a y-axis direction of the donor substrate using the y-galvanometer.
3. The method according to claim 2 , wherein scanning the predetermined region of the donor substrate in the x-axis direction using the x-galvanometer and positioning the laser beam in the y-axis direction of the donor substrate using the y-galvanometer are repeated 4 to 6 times.
4. The method according to claim 2 , wherein scanning the predetermined region of the donor substrate in the x-axis direction using the x-galvanometer and positioning the laser beam in the y-axis direction of the donor substrate using the y-galvanometer are repeated 5 times.
5. The method according to claim 1 , wherein scanning the laser beam with multi-lines in one step comprises:
positioning the laser beam in a y-axis direction of the donor substrate using the y-galvanometer; and
scanning the predetermined region of the donor substrate in an x-axis direction using the x-galvanometer.
6. The method according to claim 5 , wherein positioning the laser beam in the y-axis direction of the donor substrate using the y-galvanometer and scanning the predetermined region of the donor substrate in the x-axis direction using the x-galvanometer are repeated 4 to 6 times.
7. The method according to claim 5 , wherein positioning the laser beam in the y-axis direction of the donor substrate using the y-galvanometer and scanning the predetermined region of the donor substrate in the x-axis direction using the x-galvanometer are repeated 5 times.
8. The method according to claim 1 , wherein forming the organic layer pattern on the pixel electrode is performed in an N2 atmosphere.
9. The method according to claim 1 , wherein forming the organic layer pattern on the pixel electrode is performed in a vacuum atmosphere.
10. The method according to claim 1 , wherein the organic layer pattern is a single layer or a multi-layer made of at least two layers selected from a group consisting of an emission layer, a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer.