Complementary metal oxide semiconductor image sensor and method for fabricating the same
View Patent ↗A CMOS image sensor and a method for fabricating the same is disclosed, to enhance the efficiency in condensing the light by forming a multi-layered micro lens with various materials having different refractive indexes, in which the CMOS image sensor includes a plurality of photosensitive devices on a semiconductor substrate; an insulating interlayer on the plurality of photosensitive devices; a plurality of color filter layers in correspondence with the respective photosensitive devices, to filter the light by respective wavelengths; a first micro-lens layer on an entire surface of the color filter layers, to condense the light; and a plurality of second micro-lens layers on the first micro-lens layer in correspondence with the respective photosensitive devices, wherein the second micro-lens layer has the different refractive index from that of the first micro-lens layer.
1. A method for fabricating a CMOS image sensor comprising:
forming an insulating interlayer on a semiconductor substrate having a plurality of photosensitive devices;
forming color filter layers having a first refractive index on the insulating interlayer in correspondence with the respective photosensitive devices;
forming a first micro-lens layer having a second refractive index to have a flat shape and to cover substantially an entire surface of the color filter layers; and
forming a second micro-lens layer having a third refractive index on the first micro-lens layer;
wherein the first refractive index is greater than the second refractive index, and the second refractive index is greater than the third refractive index.
2. The method of claim 1 , wherein the first and second micro-lens layers are respectively formed of an oxide layer and a photoresist, or are formed of any one material having the different refractive indexes.
3. The method of claim 1 , further comprising,
forming a protective layer between the insulating interlayer and the color filter layers.
4. The method of claim 1 , further comprising,
forming a top-coating layer between the color filter layers and the first micro-lens layer.