IP Library Granted Patent US 7,135,737
Granted Patent B2
US 7,135,737 · App. 11/023,426 · Granted Nov 14, 2006

Non-volatile flash memory device

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Quick Facts
Patent No.
US 7,135,737
App. No.
11/023,426
Granted
Nov 14, 2006
Kind
B2
Abstract

A non-volatile memory device having sidewall floating gates implementing two bits with just one transistor is disclosed. A disclosed method comprises a non-volatile memory device having a unit cell comprising: a transistor including a polysilicon gate, sidewall floating gates, block oxide layers and source and drain regions; a word line vertically placed on a substrate and connected to the polysilicon gate; and a pair of bit lines orthogonally placed to the word line and connected to the source and drain regions.

Claims (10)

1. A non-volatile memory device having a unit cell comprising:

a transistor including a gate oxide layer on a substrate, a polysilicon gate contacting the gate oxide layer, sidewall floating gates, a tunnel oxide layer between the sidewall floating gates and the substrate, block oxide layers, a sidewall spacer on a side of the polysilicon gate and a side of the sidewall floating gates, a polysilicon oxide layer which covers a top and the side of the polysilicon gate and the side of the sidewall floating gates, and source and drain regions;

a word line vertically placed on the substrate and connected to the polysilicon gate; and

a pair of bit lines orthogonally placed to the word line and connected to the source and drain regions.

2. The device as defined by claim 1 , wherein the non-volatile memory device has no bit line contact.

3. The device as defined by claim 1 , wherein the polysilicon gate is a ‘T’ shaped gate, which means that the upper part of the polysilicon gate is wider than the lower part of the polysilicon gate.

4. The device as defined by claim 1 , wherein the block oxide layers comprise first block oxide layers and second block oxide layers.

5. The device as defined by claim 4 , wherein the first block oxide layers have a thickness ranging between 50 Å and 250 Å and are made of a material selected from a group consisting of Al 2 O 3 and Y 2 O 3 .

6. The device as defined by claim 4 , wherein the second block oxide layers have a thickness ranging between 20 Å and 150 Å and are made of SiO 2 .

7. The device as defined by claim 1 , wherein a threshold voltage of the sidewall floating gates decreases as an erase operation time increases and converges to a predetermined threshold voltage at the end of the erase operation.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 28, 2014
From: DONGBU HITEK CO., LTD.
To: DSS TECHNOLOGY MANAGEMENT, INC.
Reel/Frame 033035/0680 →
CHANGE OF NAME Recorded Jul 13, 2006
From: DONGBUANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 018099/0256 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2004
From: JUNG, JIN HYO
To: DONGBUANAM SEMICONDUCTOR INC.
Reel/Frame 016146/0893 →