CMOS image sensor and method for fabricating the same
View Patent ↗A complementary metal-oxide semiconductor (CMOS) image sensor and a method for fabricating the same are disclosed. The CMOS image sensor a plurality of photosensitive devices formed on a semiconductor substrate, an interlayer dielectric formed on the photosensitive devices, and a plurality of color filter layers facing into each interlayer dielectric and filtering light for each wavelength, a planarization layer formed on each of the color filter layers, and a micro-lens layer formed on the planarization layer and having a refractive index distribution, in which light is focused to the photosensitive device facing thereto, based on an ion injection profile.
1. A method of fabricating a complementary metal-oxide semiconductor image sensor, comprising:
forming interlayer dielectrics on a plurality of photosensitive devices formed on a semiconductor substrate;
forming a plurality of color filter layers on the interlayer dielectrics, each of the color filter layers facing into each photosensitive device;
forming a planarization layer on the color filter layers;
depositing a lens-forming material layer on the planarization layer; and
injecting and dispersing ions onto the lens-forming material layer to form a micro-lens layer having a refractive index distribution, in which light is focused onto the photosensitive device facing thereto,
wherein the ions are injected by using a mask layer, the mask layer having an opening corresponding to a center portion of the lens-forming material layer, and wherein the lens-forming material is patterned to have a rectangular shape.
2. The method of claim 1 , wherein said injecting and dispersing of ions is performed after said patterning the lens-forming material layer to have the rectangular shape, so that the lens-forming material layer faces into each of the photosensitive devices.