Method of fabricating a photomask
View Patent ↗A method of fabricating a photomask automatically generates a microscopic supplementary pattern by selective sizing to reduce a product cost and by which a precise line width is provided in a manner of decreasing unnecessary microscopic supplementary patterns to raise precision of a photomask pattern. The method includes the steps of selectively carrying out a sizing on a main pattern to form a microscopic supplementary pattern with a difference of the corresponding sizing and selectively removing the microscopic supplementary pattern.
1. A method of fabricating a photomask, comprising steps of:
(a) selectively carrying out a same sizing of a common feature distributed throughout an original main pattern in occupied parts and a remaining part, said sizing being consistent with a predetermined design rule, and said remaining part being void of said common feature and having a two dimensional area that is greater in each dimension than a system resolution;
(b) selectively carrying out another sizing with the common feature being increased by a predetermined amount, and representing any overlapping areas as a single predetermined amount;
(c) subtracting a result of step (b) and step (a) and adding the original main pattern to a subtraction result;
(d) selectively identifying the remaining part as including the common feature so as to remove the remaining part; and
(e) subtracting a resulting pattern formed in step (d) from a result of step (c) to form a resulting photomask, wherein
said resulting photomask having a resulting remaining part that is two dimensional and a shortest dimension thereof being less than a system resolution.
2. The method of claim 1 , wherein the common feature is contact hole and the remaining part is a shield part.
3. The method of claim 1 , wherein the method is a computer implemented method.
4. The method of claim 3 , wherein step (b) is performed by expressing a result as A 1 =bias(x, A 0 ), where x is a predetermined fraction and A 0 is original contact hole data.
5. The method of claim 4 , wherein x=0.220.
6. The method of claim 5 , wherein step (c) is represented as A 3 =(A 2 −A 1 )+A 0 , where A 2 =bias(0.270, A 0 ).
7. The method of claim 6 , wherein the resulting photomask is represented as A 5 =(A 4 −A 3 ), where A 4 =bias(0.900, A 0 ).