Method of fabricating memory cell in semiconductor device
View Patent ↗A method of fabricating a memory cell in a semiconductor device, by which a data storage function is dichotomized in a manner of controlling a quantity of electrons injected in each floating gate according to drain and control gate voltages applied thereto. The method includes the steps of defining source, first floating gate, control gate, second floating gate, and drain areas on a substrate to have the control gate area lie between the first and second floating gate areas, forming source and drain regions on the source and drain areas of the substrate, respectively, forming a gate oxide layer on the semiconductor substrate, and reducing the gate oxide layer on the first and second floating gate areas in thickness. The method also includes forming first and second floating gates on the reduced gate oxide layer in the first and second gate areas, respectively, forming an ONO layer on top sides and confronting sidewalls of the first and second floating gates, and forming a control gate on the ONO layer and the gate oxide layer on the control gate area to be overlapped with the first and second floating gates.
1. A method of fabricating a memory cell in a semiconductor device, comprising the steps of:
defining a source area, a first floating gate area, a control gate area, a second floating gate area, and a drain area on a substrate to have the control gate area lie between the first and second floating gate areas;
forming source and drain regions on the source and drain areas of the substrate, respectively;
forming a gate oxide layer on the semiconductor substrate;
reducing the gate oxide layer on the first and second floating gate areas in thickness;
forming first and second floating gates on the reduced gate oxide layer in the first and second gate areas, respectively;
forming an oxide-nitride-oxide layer on top sides and confronting sidewalls of the first and second floating gates; and
forming a control gate on the oxide-nitride-oxide layer and the gate oxide layer on the control gate area to be overlapped with the first and second floating gates.
2. The method of claim 1 , wherein, in the gate oxide layer reducing step, the gate oxide layer on the first and second floating gate areas is etched to be thinner than the gate oxide layer on the control gate area.
3. The method of claim 2 , wherein the gate oxide layer is anisotropically etched using an etch mask provided to cover the gate oxide layer on the control gate area.
4. The method of claim 1 , wherein the substrate is a semiconductor substrate.
5. The method of claim 1 , further comprising the step of forming impurity layers in the substrate of the source and drain areas, respectively.
6. A method of fabricating a memory cell in a semiconductor device, comprising:
a step for defining a source area, a first floating gate area, a control gate area, a second floating gate area, and a drain area on a substrate to have the control gate area lie between the first and second floating gate areas;
a step for forming source and drain regions on the source and drain areas of the substrate, respectively;
a step for forming a gate oxide layer on the semiconductor substrate;
a step for reducing the gate oxide layer on the first and second floating gate areas in thickness;
a step for forming first and second floating gates on the reduced gate oxide layer in the first and second gate areas, respectively;
a step for forming an oxide-nitride-oxide layer on top sides and confronting sidewalls of the first and second floating gates; and
a step for forming a control gate on the oxide-nitride-oxide layer and the gate oxide layer on the control gate area to be overlapped with the first and second floating gates.
7. The method of claim 6 , wherein, in the step for reducing the gate oxide layer, the gate oxide layer on the first and second floating gate areas is etched to be thinner than the gate oxide layer on the control gate area.
8. The method of claim 7 , wherein the gate oxide layer is anisotropically etched using an etch mask provided to cover the gate oxide layer on the control gate area.
9. The method of claim 6 , wherein the substrate is a semiconductor substrate.
10. The method of claim 6 , further comprising a step for forming impurity layers in the substrate of the source and drain areas, respectively.