Method for removing mottled etch in semiconductor fabricating process
View Patent ↗A method for removing mottled etch in a semiconductor fabricating process, prevents mottled etch from being generated after etching, by performing ashing using an oxide plasma, prior to performing wet etching using a photoresist pattern. The method for removing the mottled etch includes the steps of forming a gate oxide film on a semiconductor substrate; forming a photoresist pattern on the substrate; performing ashing using an oxygen plasma; and removing the oxide film consequently by wet etching, the oxide film being opened by the pattern.
1. A method for removing mottled etch in a semiconductor fabricating process, comprising the steps of:
forming a gate oxide film on a semiconductor substrate;
forming a photoresist pattern on the gate oxide film to expose a portion of the gate oxide film;
supplying oxygen to the exposed portion of the gate oxide film;
applying power to the supplied oxygen at a temperature of 80 to 150° C. to perform surface treatment on the exposed portion of the gate oxide film; and
removing the exposed portion of the gate oxide film by wet etching using the photoresist pattern as a mask.
2. The method of claim 1 , wherein the surface treatment step includes the steps of applying the oxygen plasma in an environment having a pressure of 1 to 2 Torr, and a power of 1000 to 2000 W, and spilling the oxygen of 300 to 3000 sccm and H2N2 of 300 to 2000 sccm for between 2 and 15 seconds.