Lithography apparatus and method for measuring alignment mark
View Patent ↗A lithographic exposing system having an optical system including a light source, a lens, a mirror and a filter, and transferring patterns formed on a reticle to a substrate. The method includes a device for lowering the energy of the light from the light source below a threshold energy, an equipment for making the light that has passed through the device a light source for measuring alignment marks formed on the substrate, and a light path controlling device for directing the light from the light source toward the optical system in an exposing process and for making the light from the light source toward said the alignment mark measuring equipment.
1. An exposing apparatus having an optical system including a light source, one or more lens, a mirror and a filter, and transferring patterns formed on a reticle to a substrate, said apparatus comprising:
an energy adjustment device configured to lower an energy of a light from the light source below a threshold energy;
an alignment mark measuring equipment configured to use the light that passes through the energy adjustment device as a light source for measuring alignment marks formed on the substrate; and
a light path controlling device configured to direct the light from the light source toward said optical system during an exposing process and toward said alignment mark measuring equipment during measurement of the alignment marks.
2. The exposing apparatus of claim 1 , further comprising a selection filter configured to extract from the light a specific wavelength for exposing or measuring.
3. The exposing apparatus of claim 1 , wherein said alignment mark measuring equipment includes:
means for collecting light;
an optical system configured to control light passing through the light collecting means; and
an imaging device configured to detect the alignment marks by using light reflected from the substrate after the light passes through the optical system and emanates to the substrate.
4. A method for measuring alignment marks, comprising the steps of:
extracting a measuring light from a light source of an exposing equipment, the measuring light having a wavelength identical to a wavelength of light from the light source used in an exposing process;
lowering the energy of the measuring light below a threshold energy; and
measuring alignment marks with the measuring light, which has lower energy than the threshold energy.
5. The method of claim 4 , wherein the wavelength of the measuring light is one selected from a group consisting of g-line of 436 nm, i-line of 365 nm, 248 nm and 193 nm.