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App. No. 11/025,010 · Confirmation No. 3571

Etching methods to prevent plasma damage to metal oxide semiconductor devices

Inventor: Rae Sung Kim
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-05-07 ABN Abandonment 2 View
2008-09-03 CTNF Non-Final Rejection 10 View
2008-09-03 892 List of references cited by examiner 1 View
2008-09-03 SRFW Search information including classification, databases and other search related notes 1 View
2008-07-15 RCEX Request for Continued Examination (RCE) 1 View
2008-07-15 LET. Miscellaneous Incoming Letter 3 View
2008-07-15 XT/ Extension of Time 1 View
2008-07-15 WFEE Fee Worksheet (SB06) 1 View
2008-06-16 CTAV Advisory Action (PTOL-303) 3 View
2008-06-16 CTAV Advisory Action (PTOL-303) 1 View
2008-06-03 A.NE Response After Final Action 1 View
2008-06-03 SPEC Specification 4 View
2008-06-03 CLM Claims 2 View
2008-06-03 ABST Abstract 1 View
2008-06-03 REM Applicant Arguments/Remarks Made in an Amendment 18 View
2008-06-03 AF/D Affidavit-submitted prior to Mar 15, 2013 71 View
2008-06-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-06-03 WFEE Fee Worksheet (SB06) 1 View
2008-03-03 CTFR Final Rejection 15 View
2008-03-03 892 List of references cited by examiner 1 View
2008-03-03 SRNT Examiner's search strategy and results 5 View
2008-03-03 BIB Bibliographic Data Sheet 1 View
2008-03-03 SRFW Search information including classification, databases and other search related notes 1 View
2008-03-03 CTFR Final Rejection 1 View
2007-12-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2007-12-17 SPEC Specification 6 View
2007-12-17 CLM Claims 2 View
2007-12-17 ABST Abstract 1 View
2007-12-17 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2007-12-17 WFEE Fee Worksheet (SB06) 1 View
2007-09-17 CTNF Non-Final Rejection 8 View
2007-09-17 892 List of references cited by examiner 1 View
2007-09-17 BIB Bibliographic Data Sheet 1 View
2007-09-17 SRFW Search information including classification, databases and other search related notes 1 View
2007-09-11 SRNT Examiner's search strategy and results 2 View
2006-05-30 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-05-12 PA.. Power of Attorney 1 View
2006-05-12 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2006-05-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-12-28 TRNA Transmittal of New Application 4 View
2004-12-28 SPEC Specification 8 View
2004-12-28 CLM Claims 1 View
2004-12-28 ABST Abstract 1 View
2004-12-28 DRW Drawings-only black and white line drawings 4 View
2004-12-28 OATH Oath or Declaration filed 3 View
2004-12-28 WFEE Fee Worksheet (SB06) 1 View
2004-12-28 WFEE Fee Worksheet (SB06) 1 View
2004-12-28 FRPR Certified Copy of Foreign Priority Application 13 View
2004-12-28 136A Authorization for Extension of Time all replies 4 View
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Quick Facts
App. No.
11/025,010
Filed
2004-12-28
Pub. No.
US20050143035A1
Art Unit
1794