Image sensor with a protection layer
View Patent ↗An image sensor die comprises a substrate and an image sensor array formed over the substrate. Micro lens are disposed on the image sensor array. A protection layer is formed on the micro lens to prevent the micro lens from particle containment.
1. An image sensor die, comprising:
a substrate;
an image sensor array formed over said substrate;
a micro lens disposed on said image sensor array; and
a repellency layer formed on said micro lens, wherein a thickness of said repellency layer is less than 0.5 micron meters, wherein the material of said repellency layer includes polycarbonate or fluoropolymer.
2. The image sensor die in claim 1 , wherein said repellency layer includes SOG (Spin on Glass) process.
3. The image sensor die in claim 1 , wherein said image sensor array includes CMOS or CCD.
4. The image sensor die in claim 1 , farther comprising a filtering layer formed on said repellency layer.
5. The image sensor die in claim 4 , wherein said filtering layer is IR filtering film.
6. The image sensor die in claim 1 , further comprising a color filter formed over said image sensor array.
7. The image sensor die in claim 1 , wherein material of said substrate includes glass, semiconductor material, ceramic or quartz.
8. The image sensor die in claim 1 , wherein said repellency layer is a water repellency layer, an oil repellency layer or a low refractive index layer.