Method for fabricating semiconductor device to minimize terminal effect in ECP process
View Patent ↗A method for fabricating a semiconductor device to minimize a terminal effect in an ECP process is disclosed. The method for fabricating a semiconductor device to minimize a terminal effect in an ECP process, comprises depositing a barrier metallic layer on the top of a damascene pattern formed through an etching process, forming an Ag seed layer by employing a heating process for the reaction of the surface of the barrier metallic layer and a NH 3 solution of AgNO 3 and reductive materials in a reactor, plating a Cu layer by using the Ag seed layer through an ECP process and forming a Cu interconnect through an annealing process and a Cu CMP process. The method for fabricating a semiconductor device according to the present invention provides the improvement of uniformity by forming a seed layer with low-resistivity regardless of a thin thickness in order to avoid a terminal effect in an ECP process.
1. A method for fabricating a semiconductor device, comprising:
(a) depositing a barrier metal layer on a damascene pattern on a wafer;
(b) forming an Ag seed layer on the barrier metal layer in a reactor, by a process comprising:
immersing the wafer having the barrier metal layer thereon into a solution including NH 3 and AgNO 3 ;
performing a heating process to react a surface of the wafer with the solution and a reductive material; and
rotating the wafer during the heating process;
(c) plating a Cu layer on the Ag seed layer through an ECP process; and
(d) forming a Cu interconnect by annealing the wafer and polishing the wafer with the Cu layer thereon by a Cu CMP process.
2. The method as defined in claim 1 , further comprising providing the reductive material and the solution of AgNO 3 and NH 3 by a batch bath.
3. The method as defined in claim 1 , wherein the reductive material comprises sucrose.
4. The method as defined in claim 1 , comprising providing the reductive material and the solution of AgNO 3 and NH 3 by a dispense method.
5. The method as defined in claim 1 , wherein the method minimizes a terminal effect in the ECP process.
6. The method as defined in claim 1 , further comprising forming the damascene pattern by an etching process.
7. The method as defined in claim 1 , wherein the wafer is rotated at a predetermined RPM.
8. The method as defined in claim 1 , wherein the seed layer has low resistivity.
9. The method as defined in claim 1 , wherein forming the seed layer comprises a silver mirror reaction.
10. The method us defined in claim 1 , wherein the seed layer has substantial uniformity.