Method of forming an isolated line pattern using photolithography
View Patent ↗A method of forming an isolated line on a wafer is disclosed. The disclosed method comprises preparing a first mask comprising an isolated line pattern and dummy patterns, the dummy patterns being positioned on either side of the isolated line pattern; forming an isolated line pattern and dummy patterns on a wafer by performing a first exposure process using the first mask; preparing a second mask comprising a second pattern, the second pattern being positioned so as to completely cover the isolated line pattern on the wafer; and removing the dummy patterns on the wafer by performing a second exposure process using the second mask.
1. A method of forming an isolated line pattern using a photolithography process comprising:
preparing a first mask comprising an isolated line pattern, a first plurality of dummy patterns positioned on a first side of the isolated line pattern, and a second plurality of dummy patterns positioned on an opposite side of the isolated line pattern;
forming the isolated line pattern and the dummy patterns on a wafer by performing a first exposure process using the first mask;
preparing a second mask comprising a second pattern positioned so as to completely cover the isolated line pattern on the wafer and expose the first and second pluralities of dummy patterns and the entire regions between the dummy patterns in each plurality of dummy patterns; and
removing the dummy patterns on the wafer by performing a second exposure process using the second mask.
2. A method as defined by claim 1 , wherein each of the dummy patterns on the first mask has a width equal to or less than the width of the isolated line pattern.
3. A method as defined by claim 1 , wherein the first mask pattern is prepared so that the space between the isolated line pattern and the adjacent dummy pattern on the first mask is equal to or larger than the width of the isolated line pattern.
4. A method as defined by claim 1 , wherein the second exposure process using the second mask removes the dummy patterns on the wafer by exposing the dummy patterns to light so that only the isolated line pattern remains on the wafer.
5. The method as defined by claim 1 , wherein the second pattern on the second mask has a width (D) determined in consideration of the width (A) of the isolated line pattern and the space (B) between the isolated line pattern and the adjacent dummy pattern as follows:
{( A+ 2 B )×(2/3)}< D ≦( A+ 2 B ).
6. The method as defined by claim 1 , wherein the dummy patterns are in a photoresist.
7. The method as defined by claim 1 , further comprising preparing the first mask.
8. The method as defined by claim 7 , further comprising preparing the second mask.
9. The method as defined by claim 1 , further comprising forming a gate after removing the dummy patterns.