IP Library Granted Patent US 7,145,192
Granted Patent B2
US 7,145,192 · App. 11/035,481 · Granted Dec 5, 2006

MOS transistor and method of manufacturing the same

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Quick Facts
Patent No.
US 7,145,192
App. No.
11/035,481
Granted
Dec 5, 2006
Kind
B2
Abstract

An object of the present invention is to provide a MOS transistor of a new structure and a method of manufacturing the same that is capable of easily fabricating a high integration density device by overcoming photolithography limitations. The object of the present invention is accomplished by a MOS transistor, including a semiconductor substrate having a projection in which the width of an upper portion thereof is larger than that of a lower portion thereof; an isolating layer formed in the middle of substrate of the projection; first and second drain regions formed within the surface of the substrate of the projection; first and second source regions formed within the surface of the substrate on both sides of the projection; a gate insulating layer formed on the entire surface of the substrate; and first and second gates formed on the gate insulating layer on both sides of the substrate of the projection.

Claims (10)

1. A MOS transistor comprising:

a semiconductor substrate having a projecting portion in which the width of an upper portion thereof is larger than that of a lower portion thereof;

an isolating layer formed in the middle of the projecting portion of the substrate;

first and second drain regions formed within the surface of the projecting portion of the substrate;

first and second source regions formed within the surface of the substrate at a position exterior to the projecting portion;

a gate insulating layer formed on the entire surface of the substrate; and

first and second gates formed on the gate insulating layer at a position exterior to the projecting portion of the substrate, wherein the isolating layer is located between the first and second gates.

2. The MOS transistor of claim 1 , wherein the isolating layer is a deep trench type.

3. The MOS transistor of claim 2 , wherein the depth of the isolating layer is larger than the height of the projecting portion.

4. The MOS transistor of claim 1 , wherein channels are respectively formed vertically within the substrate of the projecting portion adjacent to the first and second gates.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNOR PREVIOUSLY RECORDED ON REEL 017749 FRAME 0335. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNOR SHOULD BE "DONGBUANAM SEMICONDUCTOR INC.". Recorded Jun 21, 2006
From: DONGBUANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 017821/0670 →
CHANGE OF NAME Recorded Jun 8, 2006
From: DONGANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 017749/0335 →
CHANGE OF NAME Recorded Jul 11, 2005
From: ANAM SEMICONDUCTOR INC.
To: DONGBUANAM SEMICONDUCTOR INC.
Reel/Frame 016504/0614 →