Short edge smoothing for enhanced scatter bar placement
View Patent ↗An edge-smoothing process identifies a target edge fragment among a number of edge fragments that form a feature in a photolithographic design. Each of the edge fragments has a length and a classification. The length of the target edge fragment is less than a minimum scatter bar length. The target edge fragment is also classified so that it will receive a scatter bar, and the target edge fragment has a collinear edge fragment. The target edge fragment is smoothed in conjunction with the collinear edge fragment to increase the length of the target edge fragment.
1. A method of preparing integrated circuit design data for the creation of a photolithographic mask, comprising:
receiving data representative of at least a portion of an integrated circuit design, the data defining features to be created on a semiconductor wafer;
fragmenting the data into a number of edge fragments;
determining edge fragments that are to receive a scattering bar to improve their printability on a wafer;
determining edge fragments having a length that is less than a minimum scattering bar length and are in-line with an edge fragment that is also to receive a scattering bar; and
adjusting the length of the edge fragments and the adjacent edge fragments such that the edge fragments to receive scattering bars have a length greater than or equal to the minimum scattering bar length.
2. A computer-readable media including a set of instructions that are executable by a computer to perform the method of claim 1 .