Electrical circuit conductor inspection

1. An electrical circuit inspection apparatus comprising:

a first inspection functionality operative to obtain first attribute information with respect to a first attribute associated with a conductor location on an electrical circuit;

a second inspection functionality operative to obtain second attribute information with respect to a second attribute associated with said conductor location on said electrical circuit, said second attribute being different from said first attribute;

and a conductor attribute analyzer receiving said first attribute information and said second attribute information and providing a defect indication for a conductor location whereat a defect is indicated in said first attribute information and additionally indicated in said second attribute information.

2. The electrical circuit inspection apparatus according to claim 1 , wherein said first inspection functionality senses reflectivity at said conductor location as a basis for said first attribute information.

3. The electrical circuit inspection apparatus according to 2 , wherein said second inspection functionality senses luminescence at said conductor location as a basis for said second attribute information.

4. The electrical circuit inspection apparatus according to claim 1 , wherein said second inspection functionality senses luminescence at said conductor location as a basis for said second attribute information.

5. An electrical circuit inspection method comprising:

obtaining first attribute information for a first attribute associated with a conductor at a plurality of conductor locations on an electrical circuit;

obtaining second attribute information for a second attribute associated with a conductor at said plurality of locations, said second attribute being different than said first attribute; and

determining a conductor defect at one or more of said conductor locations, said determining comprising:

identifying a first conductor structure from said first attribute information;

additionally identifying a second conductor structure from said second attribute information; and

outputting a defect indication for locations whereat said first conductor structure and said second conductor structure are indicative of a defect.

6. The electrical circuit inspection method according to claim 5 , wherein said obtaining of said first attribute information comprises sensing a reflectivity value.

7. The electrical circuit inspection method to 6 , wherein said providing of said second attribute information comprises sensing a luminescence value.

8. The electrical circuit inspection method according to claim 5 , wherein said obtaining of said second attribute information comprises sensing a luminescence value.

9. The electrical circuit inspection method according to claim 5 , and wherein said obtaining of said second attribute information comprises sensing a height value.

10. The electrical circuit inspection method according to claim 9 , wherein said obtaining of said second attribute information further comprises sensing said height value based on a topographical profile.

11. The electrical circuit inspection method according claim 5 , further comprising employing said inspection attribute to determine a defect in a process used to fabricate said electrical circuit.

12. The electrical circuit inspection method according to claim 5 , further comprising making a production determination based on said inspection attribute.

13. The electrical circuit inspection method according to claim 12 , wherein said production determination is one of:

approving said electrical circuit;

discarding said electrical circuit; and

repairing said electrical circuit.

14. The electrical circuit inspection method according to claim 5 , wherein said first conductor structure corresponds to a different part of a conductor than said second conductor structure.

15. The electrical circuit inspection method according to claim 5 , wherein said first conductor structure corresponds to the same part of a conductor as said second conductor structure.