Semiconductor device having dual stacked MIM capacitor and method of fabricating the same
Semiconductor devices having a dual stacked MIM capacitor and methods of fabricating the same are disclosed. The semiconductor device includes a dual stacked MIM capacitor formed on the semiconductor substrate. The dual stacked MIM capacitor includes a lower plate positioned, an upper plate electrically connected to the lower plate and positioned above the lower plate, and an intermediate plate interposed between the lower plate and the upper plate. An upper interconnection line is positioned at the same level as the upper plate. The upper interconnection line is electrically connected to the intermediate plate. As a result, the upper plate may be formed by a damascene process.
1. A semiconductor device, comprising:
a lower insulating layer disposed on a semiconductor substrate;
a dual stacked Metal-Insulator-Metal (MIM) capacitor comprising;
a lower plate disposed on the lower insulating layer,
an upper plate electrically connected to the lower plate and disposed above the lower plate, and
an intermediate plate interposed between the lower plate and the upper plate; and
a first upper interconnection line disposed at the same level as the upper plate, electrically connected to the intermediate plate, and electrically insulated from the upper plate and lower plate.
2. The semiconductor device of claim 1 , wherein the dual stacked MIM capacitor further comprises:
a lower dielectric layer disposed on the lower insulating layer and interposed between the lower plate and the intermediate plate;
a first upper dielectric layer disposed on the lower dielectric layer; and
a second upper dielectric layer disposed on the first upper dielectric layer.
3. The semiconductor device of claim 2 , further comprising:
a first via extending through the first and second upper dielectric layers and the lower dielectric layer to electrically connect the upper plate and the lower plate;
a second via extending through the first and second upper dielectric layers to electrically connect the first upper interconnection line and the intermediate plate; and
a third via extending through the first and second upper dielectric layers and the lower dielectric layer to directly connect the second upper interconnection line and the lower interconnection line,
wherein the first via is positioned at the same level as the third via.
4. The semiconductor device of claim 1 , further comprising:
an upper insulating layer to insulate the upper plate, first interconnection line, and second interconnection line;
an etch stop layer disposed between the upper insulating layer and intermediate plate; and
an inter-insulating layer disposed between the etch stop layer and the intermediate plate.
5. A semiconductor device, comprising:
a lower insulating layer disposed on a semiconductor substrate;
a dual stacked Metal-Insulator-Metal (MIM) capacitor comprising;
a lower plate disposed on the lower insulating layer,
an upper plate electrically connected to the lower plate and disposed above the lower plate,
an intermediate plate interposed between the lower plate and the upper plate,
a lower dielectric layer disposed on the lower insulating layer and interposed between the lower plate and the intermediate plate,
a first upper dielectric layer disposed on the lower dielectric layer, and
a second upper dielectric layer disposed on the first upper dielectric layer;
a first upper interconnection line disposed at the same level as the upper plate, electrically connected to the intermediate plate, and electrically insulated from the upper plate and lower plate;
a lower interconnection line disposed at the same level as the lower plate; and
a second upper interconnection line spaced apart from the upper interconnection line and disposed at the same level as the first upper interconnection line, the second upper interconnection line being electrically connected to the lower interconnection line.
6. The semiconductor device of claim 5 , wherein the lower plate and the lower interconnection line each comprise a barrier metal layer and a metal layer.
7. A semiconductor device, comprising:
a lower insulating layer disposed on a semiconductor substrate;
a dual stacked Metal-Insulator-Metal (MIM) capacitor comprising; a lower plate disposed on the lower insulating layer, an upper plate electrically connected to the lower plate and disposed above the lower plate, and an intermediate plate interposed between the lower plate and the upper plate, wherein the intermediate plate comprising spacers covering sidewalls of the intermediate plate; and,
a first upper interconnection line disposed at the same level as the upper plate, electrically connected to the intermediate plate, and electrically insulated from the upper plate and lower plate.
8. The semiconductor layer of claim 7 , further comprising:
a metal barrier layer disposed on at least part of the lower plate and under the intermediate plate and spacers; and,
a lower dielectric layer disposed on the barrier metal layer and adapted to separate the barrier metal layer from the intermediate plate.
9. The semiconductor device of claim 7 , wherein the dual stacked MIM capacitor further comprises;
a first upper dielectric layer disposed on the lower insulating layer and on the spacers of the intermediate plate;
a polishing stopping layer disposed on the first upper dielectric layer; and
a second upper dielectric layer disposed on the polishing stopping layer.
10. The semiconductor device of claim 9 , further comprising:
a lower interconnection line disposed at the same level as the lower plate; and
a second upper interconnection line spaced apart from the upper interconnection line and disposed at the same level as the first upper interconnection line, the second upper interconnection line being electrically connected to the lower interconnection line.
11. The semiconductor device of claim 10 , further comprising:
a first via extending through the first and second upper dielectric layers and polishing stopping layer to electrically connect the upper plate and the lower plate.