High power semiconductor device having a schottky barrier diode
View Patent ↗A semiconductor device is configured to prevent destruction of elements and/or miss-operation of the circuit by parasitic effects produced by parasitic transistors when a MOSFET of a bridge circuit is formed on a single chip. A Schottky junction is formed by providing an anode electrode in an n well region where a source region, a drain region, and a p well region of a lateral MOSFET. A Schottky barrier diode constituting a majority carrier device is connected in parallel with a PN junction capable of being forward-biased so that the PN junction is not forward-biased so that minority carriers are not generated, and thereby suppressing parasitic effects.
1. A semiconductor device comprising:
a semiconductor substrate of one of a first or second conductivity type;
a first semiconductor region of the second conductivity type formed on a first main surface of the semiconductor substrate;
a second semiconductor region of the first conductivity type formed at the surface of the first semiconductor region;
an offset region of the second conductivity type formed in the second semiconductor region;
a Schottky electrode and an ohmic electrode formed at the surface of the offset region, wherein the ohmic electrode forms an ohmic contact with the offset region and the Schottky electrode forms a Schottky junction with the offset region; and
a first electrode that forms an ohmic contact with the second semiconductor region at the surface thereof, the first electrode being electrically connected to the Schottky electrode.
2. The semiconductor device according to claim 1 , wherein the impurity concentration of the offset region is such that, when voltage is applied to the Schottky electrode and between the first electrode and the ohmic electrode in the direction in which the Schottky junction directly below the Schottky electrode is reverse-biased, and a first PN junction between the second semiconductor region and the offset region is reverse-biased, the offset region positioned between the Schottky electrode and the ohmic electrode becomes totally depleted at a voltage equal to or below the breakdown voltage of the Schottky junction.
3. The semiconductor device according to claim 1 , wherein a field oxide film is formed at the surface of the offset region positioned between the Schottky electrode and the ohmic electrode.
4. The semiconductor device according to claim 1 , further comprising a second electrode that forms an ohmic contact with the first semiconductor region at the surface thereof, the second electrode being connected to the ohmic electrode.
5. The semiconductor device according to claim 4 , wherein the impurity concentration of the second semiconductor region is such that, when voltage is applied to the ohmic electrode and between the second electrode and the first electrode in the direction in which a first PN junction is reverse-biased, and a second PN junction between the second semiconductor region and the first semiconductor region is reverse-biased, the second semiconductor region directly below the region positioned between the Schottky electrode and the ohmic electrode becomes totally depleted at a voltage below the breakdown voltage of the first PN junction or the second PN junction.