Semiconductor light-emitting device
View Patent ↗A first cladding layer of a first conductivity type formed above a crystal substrate, an active layer formed above the first cladding layer, a diffusion prevention layer formed on the active layer and preventing an impurity from diffusing into the active layer, an overflow prevention layer of a second conductivity type, the second conductivity type being different from the first conductivity type, which is formed on the diffusion prevention layer and prevents an overflow of carriers implanted into the active layer, and a second cladding layer of the second conductivity type formed above the overflow prevention layer are provided.
1. A semiconductor light-emitting device comprising:
a first cladding layer of a first conductivity type formed above a crystal substrate;
an active layer formed above the first cladding layer;
a diffusion prevention layer formed on the active layer and preventing an impurity from diffusing into the active layer;
an overflow prevention layer of a second conductivity type, the second conductivity type being different from the first conductivity type, which is formed on the diffusion prevention layer and prevents an overflow of carriers implanted into the active layer; and
a second cladding layer of the second conductivity type formed above the overflow prevention layer.
2. The semiconductor light-emitting device according to claim 1 , wherein an impurity concentration of the overflow prevention layer is 5×10 18 /cm −3 or more, and the diffusion prevention layer is a non-doped layer.
3. The semiconductor light-emitting device according to claim 1 , wherein a thickness of the overflow prevention layer is 5 nm or more and 20 nm or less, and a thickness of the diffusion prevention layer is 0.02 μm or more and 0.15 μm or less.
4. The semiconductor light-emitting device according to claim 1 , wherein the diffusion prevention layer is a GaN layer.
5. The semiconductor light-emitting device according to claim 4 , wherein a thickness of the diffusion prevention layer is 0.02 μm or more and 0.15 μm or less.
6. The semiconductor light-emitting device according to claim 1 , wherein the overflow prevention layer is formed of Al t Ga 1-t N (t>0.16).
7. The semiconductor light-emitting device according to claim 1 , wherein the active layer has a multiple quantum well structure formed by alternately stacking, two to four times, barrier layers each having a thickness of 3 nm or more and 10 nm or less and well layers each having a thickness of 2 nm or more and 5 nm or less, and forming a barrier layer having a thickness of 3 nm or more and 10 nm or less.
8. The semiconductor light-emitting device according to claim 1 , wherein the second cladding layer of the second conductivity type includes a first layer provided above the overflow prevention layer and a ridge portion provided on the first layer.
9. The semiconductor light-emitting device according to claim 1 , wherein a ridge width of the second cladding layer in a ridge shape is 1.5 μm or more and 2.5 μm or less.
10. The semiconductor light-emitting device according to claim 1 , wherein a thickness of the second cladding layer except for a ridge portion is 0.03 μm or more and 0.2 μm or less.
11. The semiconductor light-emitting device according to claim 1 , wherein the first cladding layer of the first conductivity type and the second cladding layer of the second conductivity type are superlattice layers formed of Al s Ga 1-s N or Al s Ga 1-s N/GaN (0.0<s≦0.3), the active layer is a multiple quantum well active layer formed of In x Ga 1-x N/In y Ga 1-y N (0.05≦x≦1.0, 0≦y≦1.0, x>y), the overflow prevention layer is formed of Al t Ga 1-t N (t>s), and the diffusion prevention layer is formed of Al u Ga 1-u N (0≦u<t).
12. The semiconductor light-emitting device according to claim 11 , wherein an impurity concentration of the overflow prevention layer is 5×10 18 /cm −3 or more, and the diffusion prevention layer is a non-doped layer.
13. The semiconductor light-emitting device according to claim 11 , wherein a thickness of the overflow prevention layer is 5 nm or more and 20 nm or less, and a thickness of the diffusion prevention layer is 0.02 μm or more and 0.15 μm or less.
14. The semiconductor light-emitting device according to claim 1 , wherein the diffusion prevention layer is a GaN layer.
15. The semiconductor light-emitting device according to claim 14 , wherein a thickness of the diffusion prevention layer is 0.02 μm or more and 0.15 μm or less.
16. The semiconductor light-emitting device according to claim 11 , wherein the overflow prevention layer is formed of Al t Ga 1-t N (t>0.16).
17. The semiconductor light-emitting device according to claim 11 , wherein the active layer has a multiple quantum well structure formed by alternately stacking, two to four times, barrier layers each having a thickness of 3 nm or more and 10 nm or less and well layers each having a thickness of 2 nm or more and 5 nm or less, and forming a barrier layer having a thickness of 3 nm or more and 10 nm or less.
18. The semiconductor light-emitting device according to claim 11 , wherein the second cladding layer of the second conductivity type includes a first layer provided above the overflow prevention layer and a ridge portion provided on the first layer.
19. The semiconductor light-emitting device according to claim 1 , wherein a ridge width of the second cladding layer in a ridge shape is 1.5 μm or more and 2.5 μm or less.
20. The semiconductor light-emitting device according to claim 1 , wherein a thickness of the second cladding layer except for a ridge portion is 0.03 μm or more and 0.2 μm or less.