IP Library Patent Application 11061931
Patent Application
App. No. 11/061,931

Method and device for coherence reduction

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Quick Facts
Patent No.
US None
App. No.
11/061,931
Abstract

A laser device may include at least two mirrors forming a resonant cavity for reflecting laser radiation. The laser device may further include a diffuser, which may equalize a coherence length and/divergence during a period of time.

Claims (43)

1 . A laser device comprising:

at least two mirrors forming a resonant cavity for reflecting radiation and a region for performing stimulated emission; and

a diffuser within the resonant cavity for equalizing a divergence of the radiation during a period of time.

2 . The laser device of claim 1 , wherein the diffuser provides a phase modulation of the radiation.

3 . The laser device of claim 1 , wherein the diffuser is integrated with at least one of the mirrors forming the resonant cavity.

4 . The laser device of claim 1 , wherein at least one of the mirrors is curved.

5 . The laser device of claim 4 , wherein the at least one curved mirror is spherical.

6 . The laser device of claim 4 , wherein the at least one curved mirror is aspherical.

7 . The laser device of claim 1 , wherein at least one of the mirrors includes a reflective coating.

8 . The laser device of claim 1 , wherein the reflective coating is a multilayer reflective coating.

9 . The laser device of claim 1 , wherein a coherence property of the radiation is modified by the diffuser in at least one direction.

10 . The laser device of claim 1 , wherein a coherence property of the radiation is modified by the diffuser in at least two directions.

11 . A laser device comprising:

at least two mirrors forming a resonant cavity for reflecting radiation and a region for performing stimulated emission, wherein at least one of the mirrors is adapted to equalize a divergence of the radiation during a period of time.

12 . The laser of claim 11 , wherein at least one of the mirrors is aspherical.

13 . A laser comprising:

at least two mirrors forming a resonant cavity for reflecting laser radiation and a region for performing stimulated emission, wherein at least one of the mirrors is substantially flat in a region in the vicinity of an optical axis of the laser and a peripheral part of the at least one mirror is adapted to equalize a divergence of the radiation during a period of time.

14 . The laser of claim 13 , wherein at least one of the mirrors is spherical.

15 . The laser of claim 13 , wherein a diffuser is provided in the substantially flat region of the at least one of the mirrors for creating a laser with increased divergence.

16 . The laser of claim 1 , wherein the diffuser is at least one of a separate semi-transparent plate arranged within the resonating cavity and having a surface profile providing for phase modulation of the radiation.

17 . A method for creating a laser beam, the method comprising:

irradiating radiation into a region, within a resonant cavity including at least two mirrors, for performing stimulated emission; and

modifying the a coherence property of the radiation using a diffuser within the resonant cavity.

18 . The method of claim 17 , wherein the radiation is phase modulated by the diffuser.

19 . The method of claim 17 , wherein the diffuser is integrated with at least one of the mirrors forming the resonant cavity.

20 . The method of claim 17 , wherein the at least one mirror includes a reflective coating.

21 . The method of claim 20 , wherein the reflective coating is a multilayer reflective coating.

22 . The method of claim 17 , wherein the coherence property of the radiation is modified by the diffuser in one direction.

23 . The method of claim 17 , wherein the coherence property of the radiation is modified by the diffuser in two directions.

24 . The method of claim 17 , wherein at least one of the mirrors is curved.

25 . The method of claim 17 , wherein at least one of the mirrors is at least one of substantially flat in a region in the vicinity of an optical axis of the laser and sphere shaped.

26 . The method of claim 17 , wherein the diffuser is provided in a substantially flat region of at least one of the mirrors for creating a laser with increased divergence.

27 . The method of claim 24 , wherein the curved mirror is spherical.

28 . The method of claim 24 , wherein the curved mirror is aspherical.

29 . A laser arrangement comprising:

at least two mirrors forming a resonant cavity for reflecting radiation and a region for performing stimulated emission, wherein at least one of the mirrors is adapted to equalize a divergence of laser radiation during a period of time;

at least two electrodes forming a discharge volume; and

a housing enclosing the discharge volume and the resonant cavity.

30 . A laser device for performing the method of claim 17 .

31 . A laser arrangement including the laser device of claim 1 .

32 . A laser arrangement including the laser device of claim 11 .

33 . A laser arrangement including the laser device of claim 13 .

34 . A laser arrangement including the laser of claim 33.

Assignments (4)
TERMINATION OF LICENSE AGREEMENT Recorded Jul 8, 2009
From: ASML NETHERLANDS B.V.
To: MICRONIC LASER SYSTEMS AB (PUBL)
Reel/Frame 022917/0810 →
RELEASE OF LICENSE AGREEMENT Recorded Jun 17, 2009
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 022835/0217 →
LICENSE Recorded Nov 12, 2008
From: MICRONIC LASER SYSTEMS AB
To: ASML NETHERLANDS B.V.
Reel/Frame 021817/0782 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2005
From: SANDSTROM, TORBJORN
To: MICRONIC LASER SYSTEMS AB
Reel/Frame 016308/0578 →