Semiconductor device and method of fabricating the same
View Patent ↗A semiconductor device having interconnects is reduced in leakage current between the interconnects and improved in the TDDB characteristic. It includes an insulating interlayer 108 , and interconnects 160 filled in grooves formed in the insulating interlayer, including a copper layer 124 mainly composed of copper, having the thickness smaller than the depth of the grooves, and a low-expansion metal layer 140 , which is a metal layer having a heat expansion coefficient smaller than that of the copper layer, formed on the copper layer.
1. A semiconductor device comprising:
an insulating interlayer having a low-dielectric-constant layer with a dielectric constant smaller than that of silicon oxide and, on said low-dielectric-constant layer, an insulating layer having a mechanical strength larger than that of said low-dielectric-constant layer; and
an interconnect filled in a groove that extends through said insulating layer and said low-dielectric-constant layer, said interconnect comprising a copper layer mainly composed of copper and having a thickness smaller than the depth of said groove, and a metal layer having a heat expansion coefficient smaller than that of said copper layer, formed on said copper layer,
wherein said metal layer is thicker than said insulating layer.
2. The semiconductor device according to claim 1 , wherein the thickness of said interconnect is larger than the depth of said groove.
3. The semiconductor device according to claim 1 , wherein the thickness of said copper layer is smaller than that of said low-dielectric-constant layer.
4. The semiconductor device according to claim 1 , wherein said metal layer has a heat expansion coefficient of 4.4×10 −6 /K to 16×10 −6 /K.
5. The semiconductor device according to claim 4 wherein said metal layer includes at least one of tungsten, molybdenum, rhenium, tantalum, nickel and cobalt.