Method and apparatus for EUV plasma source target delivery
View Patent ↗An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
1. An EUV plasma formation target delivery system comprising:
a target droplet formation mechanism comprising a magneto-strictive or electro-strictive material cooperating with a target droplet delivery capillary and/or output orifice in the formation of liquid target material droplets.
2. The apparatus of claim 1 further comprising:
the target droplet formation mechanism comprises a modulator modulating the application of magnetic or electric stimulation to, respectively, the magneto-strictive or electro-strictive material.
3. The apparatus of claim 2 further comprising:
the modulator is modulated to produce an essentially constant stream of droplets for irradiation at a plasma initiation site.
4. The apparatus of claim 2 further comprising:
the modulator is modulated to produce droplets on demand for irradiation at a plasma initiation site.
5. The apparatus of claim 3 further comprising:
the magneto-strictive or electro-strictive material is arranged such that longitudinal expansion and contraction interacts with the capillary.
6. The apparatus of claim 4 further comprising:
the magneto-strictive or electro-strictive material is arranged such that longitudinal expansion and contraction interacts with the capillary.
7. The apparatus of claim 3 further comprising:
the magneto-strictive or electro-strictive material is arranged such that radial expansion and contraction interacts with the capillary.
8. The apparatus of claim 4 further comprising:
the magneto-strictive or electro-strictive material is arranged such that radial expansion and contraction interacts with the capillary.
9. The apparatus of claim 5 further comprising:
the magneto-strictive or electro-strictive material is arranged such that radial expansion and contraction interacts with the capillary.
10. The apparatus of claim 6 further comprising:
the magneto-strictive or electro-strictive material is arranged such that radial expansion and contraction interacts with the capillary.