Patent Assignment
Reel/Frame 032397/0280
Merger
Recorded: 2014-03-10
Pages: 23
Assignor
CYMER, INC.
Executed: 2013-05-30
Assignee
CYMER, LLC
17075 THORNMINT COURT, INTELLECTUAL PROP DEPT - MS/4-2D, SAN DIEGO, CALIFORNIA, 92127
Covered Properties
(23)
Optical Mountings for Gas Discharge Mopa Laser Spectral Analysis Module
Long Delay and High Tis Pulse Stretcher
Discharge Produced Plasma Euv Light Source
Method and Apparatus for Bandwidth Measurement and Bandwidth Parameter Calculation for Laser Light
High Repetition Rate Laser Produced Plasma Euv Light Source
Very High Repetition Rate Narrow Band Gas Discharge Laser System
Gas Discharge Laser Chamber Improvements
Laser Output Light Pulse Stretcher
Laser Output Beam Wavefront Splitter for Bandwidth Spectrum Control
Halogen Gas Discharge Laser Electrodes
Euv Light Source
Euv Light Source Optical Elements
Method and Apparatus for Euv Plasma Source Target Delivery
High Repetition Rate Laser Produced Plasma Euv Light Source
High Repetition Rate Laser Produced Plasma Euv Light Source
Discharge Produced Plasma Euv Light Source
Collector for Euv Light Source
Collector for Euv Light Source
Collector for Euv Light Source
Euv Light Source
Euv Light Source
Euv Light Source
Euv Light Source
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.
Corrective Assignment to Correct the Recordation Form Cover Sheet, 2. Name and Address of Receiving Party(Ies): Previously Recorded on Reel 016190 Frame 0177. Assignor(S) Hereby Confirms the Assignment from Inventors to Cymer, Inc.
Apr 23, 2012
From: ALGOTS, J. MARTIN; FOMENKOV, IGOR V.; ERSHOV, ALEXANDER I.; PARTLO, WILLIAM N.
To: CYMER, INC.
Reel/Frame 028093/0075 →
Assignment of Assignor's Interest
Apr 10, 2014
From: CYMER, LLC
To: ASML NETHERLANDS B.V.
Reel/Frame 032659/0256 →