Semiconductor device having a multi-chip stacked structure and reduced thickness
View Patent ↗A semiconductor device comprising the multi-chip stack structure that involves improved degree of freedom in routing arrangement and has reduced thickness is provided. A semiconductor device, comprising: a substrate; a lower semiconductor chip provided on the substrate; an upper semiconductor chip provided on the lower semiconductor chip; and a silicon spacer with a rerouting disposed between the lower semiconductor chip and the upper semiconductor chip, and including a protruding portion protruding farther outward than an outer periphery of the lower semiconductor chip, is provided. Second electrode pads provided on the protruding portion and first electrode pads provided on the lower semiconductor chip are connected via interconnects including through electrodes of the silicon spacer with the rerouting.
1. A semiconductor device, comprising:
a substrate;
a first semiconductor chip provided on said substrate;
a second semiconductor chip provided on said first semiconductor chip; and
a plate-shaped spacer formed between said first semiconductor chip and said second semiconductor chip, and including a protruding portion protruding farther outward than an outer periphery of said first semiconductor chip,
wherein a first electrode pad is provided on said first semiconductor chip,
wherein said spacer includes a second electrode pad provided on said protruding portion and an interconnect that connects said first electrode pad and said second electrode pad, and
wherein a third electrode pad is provided on an upper surface of said first semiconductor chip, wherein a fourth electrode pad is provided on a lower surface of said second semiconductor chip, and wherein said spacer includes an interconnect that connects said third electrode pad and said fourth electrode pad.
2. The semiconductor device according to claim 1 , wherein said interconnect of said spacer includes a through electrode that penetrates said spacer.
3. The semiconductor device according to claim 1 , wherein said second electrode pad is provided farther outward than an outer periphery of said second semiconductor chip.
4. The semiconductor device according to claim 1 , wherein said second electrode pad is provided on said protruding portion.
5. The semiconductor device according to claim 1 , wherein said spacer is a silicon substrate.
6. The semiconductor device according to claim 1 , wherein said second electrode pad is connected via wire bonding.
7. The semiconductor device according to claim 1 , further comprising a reinforcing component formed on said substrate, for sustaining said spacer at said protruding portion.
8. The semiconductor device according to claim 6 , wherein a third electrode is provided on an upper surface of said substrate, and wherein said second electrode pad is connected to said third electrode pad with wire bonding.