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App. No. 11/070,994 · Confirmation No. 5770

Method for removing a residue from a chamber

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-05-12 ABN Abandonment 2 View
2008-05-12 ABN Abandonment 1 View
2007-10-09 CTFR Final Rejection 25 View
2007-10-09 892 List of references cited by examiner 1 View
2007-10-09 SRFW Search information including classification, databases and other search related notes 1 View
2007-09-25 SRNT Examiner's search strategy and results 18 View
2007-07-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-07-20 CLM Claims 6 View
2007-07-20 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2007-07-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-07-20 WFEE Fee Worksheet (SB06) 1 View
2007-07-16 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2007-06-08 CTNF Non-Final Rejection 21 View
2007-06-08 892 List of references cited by examiner 1 View
2007-06-08 SRFW Search information including classification, databases and other search related notes 1 View
2007-05-30 SRNT Examiner's search strategy and results 25 View
2007-05-04 RCEX Request for Continued Examination (RCE) 3 View
2007-05-04 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-05-04 CLM Claims 6 View
2007-05-04 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2007-05-04 WFEE Fee Worksheet (SB06) 2 View
2007-05-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-05-04 XT/ Extension of Time 1 View
2007-05-04 WFEE Fee Worksheet (SB06) 1 View
2007-04-13 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2007-01-05 CTFR Final Rejection 13 View
2007-01-05 1449 List of References cited by applicant and considered by examiner 2 View
2007-01-05 892 List of references cited by examiner 1 View
2007-01-05 FOR Foreign Reference 6 View
2007-01-05 FOR Foreign Reference 8 View
2007-01-05 SRFW Search information including classification, databases and other search related notes 1 View
2006-12-15 SRNT Examiner's search strategy and results 17 View
2006-10-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-10-18 SPEC Specification 1 View
2006-10-18 CLM Claims 6 View
2006-10-18 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2006-10-18 XT/ Extension of Time 1 View
2006-10-18 WCLM Claims Worksheet (PTO-2022) 1 View
2006-10-18 WFEE Fee Worksheet (SB06) 1 View
2006-09-11 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2006-09-11 FOR Foreign Reference 2 View
2006-09-11 FOR Foreign Reference 24 View
2006-09-11 FOR Foreign Reference 20 View
2006-05-18 CTNF Non-Final Rejection 11 View
2006-05-18 1449 List of References cited by applicant and considered by examiner 1 View
2006-05-18 892 List of references cited by examiner 1 View
2006-05-18 FOR Foreign Reference 4 View
2006-05-18 FOR Foreign Reference 6 View
2006-05-18 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-18 BIB Bibliographic Data Sheet 2 View
2006-04-26 SRNT Examiner's search strategy and results 16 View
2005-05-16 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2005-05-16 OATH Oath or Declaration filed 4 View
2005-05-16 PA.. Power of Attorney 3 View
2005-04-28 PEFN Pre-Exam Formalities Notice 2 View
2005-03-03 TRNA Transmittal of New Application 2 View
2005-03-03 SPEC Specification 16 View
2005-03-03 CLM Claims 4 View
2005-03-03 ABST Abstract 1 View
2005-03-03 OATH Oath or Declaration filed 4 View
2005-03-03 WFEE Fee Worksheet (SB06) 1 View
2005-03-03 WFEE Fee Worksheet (SB06) 1 View
2005-03-03 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2005-03-03 FOR Foreign Reference 19 View
2005-03-03 FOR Foreign Reference 17 View
2005-03-03 FOR Foreign Reference 17 View
2005-03-03 FOR Foreign Reference 14 View
2005-03-03 FOR Foreign Reference 27 View
2005-03-03 FOR Foreign Reference 14 View
2005-03-03 FOR Foreign Reference 15 View
2005-03-03 FOR Foreign Reference 2 View
2005-03-03 FOR Foreign Reference 19 View
2005-03-03 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
11/070,994
Filed
2005-03-03
Pub. No.
US20060196525A1
Art Unit
1794