Self masking contact using an angled implant
View Patent ↗A method of implanting, for example, a phosphorous plug over a charge collection region and a method of forming a contact over the phosphorous plug implant and charge collection region. The method allows implantation of phosphorous or other materials without contamination of other contact regions. The method further allows implantation of a material with only one step and without an extra masking step.
1. A pixel sensor cell comprising:
a first slot formed in a passivation layer over a charge collection region;
a dopant implant region formed in said charge collection region underneath said first slot; and
a first contact formed through said first slot, wherein said first contact has a footprint larger than a second contact formed in said pixel sensor cell.
2. The pixel sensor cell of claim 1 , wherein said first slot has a footprint having an oblong shape.
3. The pixel sensor cell of claim 1 , wherein said first slot has a footprint having an elliptical shape.
4. The pixel sensor cell of claim 1 , wherein said charge collection region is a floating diffusion region.
5. The pixel sensor cell of claim 1 , wherein said first slot is etched in an insulator layer.
6. The pixel sensor cell of claim 1 , further comprising a layer of a blocking material, wherein said blocking material extends from an adjacent gate stack and thereby decreases a size of said footprint over said charge collection region.
7. An imaging device, comprising:
an array of pixel sensor cells formed in a doped layer, wherein each pixel sensor cell comprises:
a first slot formed in a passivation layer and over a charge collection region, a dopant implant region formed in said charge collection region underneath said first slot and a first contact formed through said first slot, wherein said first contact has a footprint larger than a second contact formed in said pixel sensor cell; and
signal processing circuitry formed in a substrate and electrically connected to the array of said pixel sensor cells for receiving and processing signals representing an image output by the array of the said sensor cells and for providing output data representing said image.
8. The imaging device of claim 7 , wherein said first slot has a footprint having an oblong shape.
9. The imaging device of claim 7 , wherein said first slot has a footprint having an elliptical shape.
10. The imaging device of claim 7 , wherein said charge collection region is a floating diffusion region.
11. The imaging device of claim 7 , wherein said first slot is etched in an insulator layer.
12. The imaging device of claim 7 , further comprising a layer of a blocking material, wherein said blocking material extends from an adjacent gate stack and thereby decreases a size of said footprint over said charge collection region.
13. A processing system comprising:
a processor; and
an imaging device coupled to said processor, said imaging device having at least one pixel sensor cell comprising:
a first slot formed in a passivation layer of said pixel sensor cell and over a charge collection region, a dopant implant region formed in said charge collection region underneath said first slot and a first contact formed through said first slot, wherein said first contact has a footprint larger than a second contact formed in said pixel sensor cell; and
a readout circuit comprising at least an output transistor formed on a substrate.
14. The system of claim 13 , wherein said first slot has a footprint having an oblong shape.
15. The system of claim 13 , wherein said first slot has a footprint having an elliptical shape.
16. The system of claim 13 , wherein said first slot is etched in an insulator layer.
17. The system of claim 13 , further comprising a layer of a blocking material, wherein said blocking material extends from an adjacent gate stack and thereby decreases a size of said footprint over said charge collection region.
18. The pixel sensor cell of claim 1 , wherein said second contact is formed in a second slot in said passivation layer.
19. The pixel sensor cell of claim 7 , wherein said dopant implant region is formed by angled implantation.
20. The processing system of claim 13 , wherein said second contact is formed through a second slot, and said second slot is formed over another dopant implant region.