Single workpiece processing chamber with tilting load/unload upper rim
View Patent ↗A process chamber for processing semi-conductor wafers. The chamber includes at least one rotor within the process chamber. The rotor is adapted to receive and/or process semi-conductor wafers. The top of the process chamber also includes a tiltable rim. This rim tilts from a non-inclined position to an inclined position. The wafers may be loaded into and unloaded from the process chamber when the rim is in its inclined position.
1. A process chamber for processing semi-conductor wafers, comprising:
at least one rotor within the process chamber adapted to receive and/or process wafers;
a tiltable rim at the top of the process chamber, which rim tilts from a non-inclined position to an inclined position, permitting wafers to be loaded into and unloaded from the process chamber when the rim is in its inclined position;
an upwardly-disposed shroud surrounding a portion of the process chamber below the tiltable rim; and
one or more exhaust ports within the tiltable rim, with the exhaust ports separated from an exhaust duct when the tiltable rim is in the inclined position, and engaged with an exhaust duct when the tiltable rim is in the non-inclined position.
2. A system for processing semi-conductor wafers, comprising:
a plurality of process chambers, with at least one of the process chambers comprising:
a rotor within the process chamber adapted to hold a wafer;
a shroud around the process chamber;
a tiltable rim on top of the shroud, with the rim tiltable from an inclined position for loading/unloading wafers into the process chamber, to a non-inclined position during processing of a wafer in the processing chamber;
a lift/rotate mechanism attached to the rotor below the tiltable rim, with the lift/rotate mechanism adapted to lift and lower the rotor, and also rotate the rotor between face-up and face-down positions; and
a robot movable among the process chambers, with the robot having an end effector adapted to move over the shroud, and the tiltable rim of the at least process chamber, when the tiltable rim is in the inclined position, for loading/unloading a wafer onto the rotor.
3. Apparatus comprising:
a process chamber;
a rotor within the process chamber adapted to hold a wafer;
a shroud around the process chamber;
a tiltable rim on top of the shroud, with the rim tiltable from an inclined position for loading/unloading wafers into the process chamber, to a non-inclined position during processing of a wafer in the processing chamber; and
a lift/rotate mechanism attached to the rotor below the tiltable rim, with the lift rotate mechanism adapted to lift and lower the rotor, and also rotate the rotor between face-up and face-down positions.
4. The apparatus of claim 3 with the rotor moveable between an elevated position entirely above the shroud to a lowered position within the shroud.
5. The apparatus of claim 3 further comprising a robot having an end effector adapted to move over the shroud, and the tiltable rim when the tiltable rim is in the inclined position, for loading/unloading a wafer onto the rotor.
6. The apparatus of claim 3 further comprising at least two inwardly facing channels in the tiltable rim.