Method for making a semiconductor device having increased conductive material reliability
View Patent ↗A method and apparatus for a semiconductor device having a semiconductor device having increased conductive material reliability is described. That method and apparatus comprises forming a conductive path on a substrate. The conductive path made of a first material. A second material is then deposited on the conductive path. Once the second material is deposited on the conductive path, the diffusion of the second material into the conductive path is facilitated. The second material has a predetermined solubility to substantially diffuse to grain boundaries within the first material.
1. A semiconductor device comprising:
a conductive path formed on a substrate, the conductive path made of a first material; and
a second material deposited on the conductive path, the second material having a predetermined solubility to diffuse to grain boundaries within the first material to increase reliability of the conductive path; and
an interface layer disposed between the conductive path and the second material, the interface layer having a thickness sufficient to diffuse the second material in the conductive path.
2. The semiconductor device of claim 1 , wherein the first material comprises a metal.
3. The semiconductor device of claim 2 , wherein the metal is copper.
4. The semiconductor device of claim 3 , wherein the conductive path comprises a conductive path formed by a damascene process.
5. The semiconductor device of claim 1 , further comprising a barrier layer between the substrate and the conductive path.
6. The semiconductor device of claim 1 , wherein the substrate comprises an interlayer dielectric layer (ILD).
7. The semiconductor device of claim 1 , wherein the second material comprises a noble metal.
8. The semiconductor device of claim 7 , wherein the second material further comprises at least one of silver, gold, palladium, ruthenium, rhodium, osmium, iridium, and platinum.
9. The semiconductor device of claim 1 , wherein the interface layer includes a dielectric material.
10. The semiconductor device of claim 1 , wherein the dielectric material includes silicon nitride.