Flat panel display device having molybdenum conductive layer
View Patent ↗A flat panel display device may include an insulating substrate with a conductive layer pattern formed of Mo layer or Mo alloy layer having a tensile stress thereon. A silicon nitride or silicon oxynitride layer may be located on the conductive layer pattern. With such an arrangement, one can achieve stress balance between the conductive layer pattern and the insulating layer, and improve the adhesion characteristics between the conductive layer pattern and the insulating layer.
1. A flat panel display device, comprising:
a conductive layer pattern located on an insulating substrate and formed of at least one of a group of a Mo layer and a Mo alloy layer having a tensile stress; and
a passivation layer comprising at least one of a group of a silicon nitride layer and a silicon oxynitride layer located on the conductive layer pattern,
wherein the tensile stress of the conductive layer pattern is approximately balanced with a compressive stress in the passivation layer, and is about 300 MPa or less.
2. The flat panel display device of claim 1 , wherein the conductive layer pattern comprises at least one of a group of a source electrode, a drain electrode, and wiring.
3. The flat panel display device of claim 1 , wherein the conductive layer pattern is between about 3000 and about 7000 Åthick.
4. The flat panel display device of claim 1 , wherein the Mo alloy comprises a Mo—W alloy.
5. The flat panel display device of claim 4 wherein the conductive layer pattern of the Mo—W alloy is about 3000 to about 7000 Åthick.
6. The flat panel display device of claim 4 , wherein the Mo—W alloy contains about 5 to about 25 wt. % of W.
7. The flat panel display device of claim 1 , wherein the silicon nitride layer and the silicon oxynitride layer each contain hydrogen of about 20 at. % or less.
8. The flat panel display device of claim 7 , wherein the silicon nitride layer and the silicon oxynitride layer each contain hydrogen of about 10 to about 20 at. %.
9. The flat panel display device of claim 1 , wherein the insulating substrate comprises a heat-treated glass substrate.
10. The flat panel display device of claim 1 , wherein the compressive stress in the passivation layer is about 200 MPa to about 400 MPa.
11. An organic light-emitting device, comprising:
a semiconductor layer located on an insulating substrate;
a conductive layer pattern formed of at least one of a group of a Mo layer and a Mo alloy layer having a tensile stress, wherein the conductive layer pattern forms at least any one of a source electrode and a drain electrode and wherein the conductive layer pattern contacts both ends of the semiconductor layer;
a passivation layer on the conductive layer pattern and comprising at least one of a group of a silicon nitride layer and a silicon oxynitride layer; and
a pixel electrode located on the passivation layer and contacting at least one of a group of the source electrode and the drain electrode, wherein the tensile stress of the conductive layer pattern is approximately balanced with a compressive stress in the passivation layer, and is about 300 MPa or less.
12. The organic light-emitting device of claim 11 , wherein the semiconductor layer comprises polycrystalline silicon.
13. The organic light-emitting device of claim 11 , wherein the pixel electrode comprises at least one of the group of Indium Tin Oxide and Indium Zinc Oxide.
14. The organic light-emitting device of claim 11 , wherein the conductive layer pattern is between about 3000 and about 7000 Åthick.
15. The organic light-emitting device of claim 11 , wherein the Mo alloy comprises a Mo—W alloy.
16. The organic light-emitting device of claim 15 , wherein the conductive layer pattern formed of the Mo—W alloy is about 3000 to about 7000 Åthick.
17. The organic light-emitting device of claim 15 , wherein the Mo—W alloy contains about 5 to about 25 wt. % of W.
18. The organic light-emitting device of claim 11 , wherein the conductive layer comprises at least one of a group of a source electrode and a drain electrode, and wherein the conductive layer also comprises wiring.
19. The organic light-emitting device of claim 11 , wherein the silicon nitride layer and the silicon oxynitride layer each contain hydrogen of about 20 at. % or less.
20. The organic light-emitting device of claim 19 , wherein the silicon nitride layer and the silicon oxynitride layer each contain hydrogen of about 10 to about 20 at. %.
21. The organic light-emitting device of claim 11 , wherein the insulating substrate comprises a heat-treated glass substrate.
22. The organic light-emitting device of claim 11 , wherein the compressive stress in the passivation layer is about 200 MPa to about 400 MPa.