Micro-switch device and method for manufacturing the same
View Patent ↗A micro device that is manufactured by semiconductor process and is electrically connected to outside for its operation. The micro device includes a circuit board, an electrode pad being provided on the circuit board, a lead substrate being provided substantially parallel to the circuit board, and a lead of conductive member being electrically connected to the electrode pad by being bent in a direction away from a surface of the lead substrate, one end of the lead being adhered to the lead substrate and the other end being a free end.
1. A micro device that is manufactured by semiconductor process and is electrically connected to outside for its operation, comprising:
a circuit board;
an electrode pad being provided on said circuit board;
a lead substrate being provided substantially parallel to said circuit board;
a lead of conductive member being electrically connected to said electrode pad by being bent in a direction away from a surface of said lead substrate, a portion of said lead being adhered to said lead substrate and one end being a free end; and
a cap substrate provided over an upper surface of said lead substrate and, together with the lead substrate, defining a through-hole in which the free end of said lead moves.
2. The micro device as claimed in claim 1 , wherein said lead is formed on said lead substrate by semiconductor process.
3. The micro device as claimed in claim 1 , wherein said circuit board is provided to face a lower surface of said lead substrate, and said lead is adhered to an upper surface of said lead substrate, and is bent from the upper surface toward the lower surface so that it is electrically connected to said electrode pad.
4. The micro device as claimed in claim 1 , wherein said lead substrate has a through-hole formed therein, and said lead, of which the other end is extended in the direction of the through-hole, is bent in a direction away from a surface of said lead substrate in the through-hole so that it is electrically connected to said electrode pad.
5. The micro device as claimed in claim 4 , wherein said lead and said electrode pad are electrically connected to each other in the vicinity of a central axis of the through-hole.
6. The micro device as claimed in claim 4 , wherein said lead and said electrode pad are electrically connected to each other in the vicinity of a central axis of the through-hole in the extending direction of said lead.
7. The micro device as claimed in claim 1 , wherein said lead and said electrode pad are formed of the same conductive member.
8. The micro device as claimed in claim 1 , wherein said lead substrate and said cap substrate are adhered to each other.
9. The micro device as claimed in claim 1 , wherein said cap substrate is a glass substrate.