Method of making a magnetic tunnel junction device
View Patent ↗A method of making a magnetic tunnel junction device is disclosed. The magnetic tunnel junction device includes a magnetic tunnel junction stack and an electrically non-conductive spacer in contact with a portion of the magnetic tunnel junction stack. The spacer electrically insulates a portion of the magnetic tunnel junction stack from an electrically conductive material used for a via that is in contact with the magnetic tunnel junction stack and a top conductor. The spacer can also prevent an electrical short between a bottom conductor and the top conductor. The spacer can prevent electrical shorts when the magnetic tunnel junction stack and a self-aligned via are not aligned with each other.
1. A magnetic tunnel junction device, comprising:
a discrete magnetic tunnel junction stack including a top portion, a bottom portion, and a side portion;
an electrically non-conductive spacer in contact with the side portion;
a dielectric layer surrounding the spacer and including a self-aligned via that extends to the top portion;
a via positioned in the self-aligned via and in contact with the top portion;
a bottom conductor in electrical communication with the bottom portion; and
a top conductor in contact with the via.
2. The magnetic tunnel junction device as set forth in claim 1 , wherein the spacer is made from a material selected from the group consisting of silicon oxide and silicon nitride.
3. The magnetic tunnel junction device as set forth in claim 1 , wherein the self-aligned via and the magnetic tunnel junction stack are not aligned relative to each other.
4. The magnetic tunnel junction device as set forth in claim 1 and further comprising:
a plurality of the magnetic tunnel devices positioned in a plurality of rows and a plurality of columns of an array;
a plurality of row conductors that are aligned with a row direction of the array; and
a plurality of column conductors that are aligned with a column direction of the array,
each of the plurality of the magnetic tunnel junction devices is positioned between an intersection of one of the row conductors with one of the column conductors,
wherein the plurality of row conductors comprises a selected one of the top conductor or the bottom conductor, and
wherein the plurality of column conductors comprises a selected one of the top conductor or the bottom conductor.
5. The magnetic tunnel junction device as set forth in claim 4 , wherein the array is a MRAM array.
6. The magnetic tunnel junction device as set forth in claim 4 , wherein the self-aligned via and the magnetic tunnel junction stack are not aligned relative to each other.