Semiconductor device including fine dummy patterns
View Patent ↗A semiconductor device of this invention includes a first interconnect pattern formed on a semiconductor substrate and a second interconnect pattern formed above the first interconnect pattern with an interlayer insulating film sandwiched therebetween. The first interconnect pattern includes a dummy pattern insulated from the first interconnect pattern, and the dummy pattern includes a plurality of fine patterns adjacent to each other and air gaps formed between the adjacent fine patterns.
1. A semiconductor device, comprising:
a first insulating film formed on a semiconductor substrate;
an interconnect layer formed on the first insulating film and having an interconnect pattern and a dummy pattern; and
a second insulating film formed on and between the interconnect pattern and the dummy pattern,
wherein the dummy pattern includes a plurality of fine patterns each of which are smaller than the interconnect pattern and air gaps sandwiched between the adjacent fine patterns, and an interconnection of the dummy pattern has a width and spacing smaller than a width and spacing of the interconnection of the interconnect pattern.
2. The semiconductor device of claim 1 , wherein the dummy pattern is formed in a region where the interconnect pattern is relatively sparse.
3. The semiconductor device of claim 1 , wherein the interconnect pattern and the dummy pattern are electrically insulated from each other.
4. The semiconductor device of claim 1 , further comprising a third insulating film between the dummy pattern and the second insulating film, the third insulating film overhanging an upper portion of an interconnection in the dummy pattern to provide the air gap between adjacent interconnections.
5. The semiconductor device of claim 1 , wherein in the dummy pattern, a plurality of linear interconnections are provided with a spacing therebetween.