Ceramic susceptor and a method of cleaning the same
An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated, specifically to 1×10 10 atoms/cm 2 or lower. It is provided a ceramic susceptor 2 having a face for mounting semiconductor 2 a wherein each of metal elements other than metal element(s) constituting the ceramic material has a count number of 1×10 11 atoms/cm 2 or lower. It is further provided a method of cleaning a ceramic susceptor 2 having a face 2 a for mounting semiconductor, wherein the susceptor is cleaned using a complexing agent capable of forming a complex with a metal element.
1. A method of cleaning a ceramic susceptor comprising a face for mounting a semiconductor, the method comprising the steps of:
applying a solution consisting of ethylenediaminetetraacetic acid and an organic acid to said susceptor; and
forming a complex of ethylenediaminetetraacetic acid with at least one metal element on said susceptor to reduce the quantity of each of said metal elements other than a metal element or metal elements constituting a ceramic material of said ceramic susceptor to 1×10 11 atoms/cm 2 or lower.
2. The method of claim 1 , further comprising the step of subjecting said susceptor to a blasting treatment before said applying step.
3. The method of claim 1 , wherein said organic acid is a weak acid.
4. The method of claim 1 , wherein said ceramic material comprises aluminum nitride.