Nonlithographic method of defining geometries for plasma and/or ion implantation treatments on a semiconductor wafer
View Patent ↗A method for defining geometries in a semiconductor wafer supported on a plate electrode in a processing chamber includes forming a reusable refractory coated laminar mask. The reusable refractory coated laminar mask is formed by defining the geometries in a laminar mask substrate, forming apertures through the laminar mask substrate, and forming a layer of refractory material over at least one surface of the laminar mask substrate. The reusable refractory coated laminar mask is positioned over the semiconductor wafer. Treating of the semiconductor wafer is performed through the apertures of the reusable refractory coated laminar mask. The treating may be plasma etching or ion etching.
1. A method for defining geometries in a semiconductor wafer in a processing chamber, the semiconductor substrate being supported on a surface of a plate electrode, the method comprising:
forming a reusable refractory coated laminar mask on a surface of the semiconductor wafer by
defining geometries in a laminar mask substrate corresponding to the geometries to be defined in the semiconductor wafer,
forming apertures through the laminar mask substrate, and
forming a layer of refractory material over at least one surface of the etched laminar mask substrate;
positioning the reusable refractory coated laminar mask over the semiconductor wafer;
coupling an RF power source to the plate electrode so that coupling between the RF power source and the reusable refractory coated laminar mask is based upon a capacitive coupling therebetween for causing ions to be accelerated through the apertures in the reusable refractor coated laminar mask; and
treating the semiconductor wafer through the apertures in the reusable refractory coated laminar mask.
2. A method according to claim 1 , wherein the laminar mask substrate comprises a dielectric.
3. A method according to claim 1 , wherein the layer of refractory material comprises at least one of yttrium oxide, carbon, silicon oxide and tungsten.
4. A method according to claim 1 , further comprising controlling a temperature of the reusable refractory coated laminar mask for preserving a one-to-one magnification ratio of transfer of the geometries to the semiconductor wafer.
5. A method according to claim 1 , wherein the laminar mask substrate has a thickness in a range of about 30 to 60 μm.
6. A method according to claim 1 , wherein the layer of plasma resistant refractory material has a thickness in a range of about 2 to 10 μm.
7. A method according to claim 1 , wherein the treating comprises a dry etching of at least a top layer of the semiconductor wafer.
8. A method according to claim 1 , wherein the treating comprises at least one of plasma etching and ion etching.
9. A method according to claim 1 , wherein the laminar mask substrate comprises an electrically conductive laminar mask substrate.
10. A method according to claim 9 , wherein the electrically conductive laminar mask substrate comprises at least one of silicon, carbon, copper and gold.
11. A method for defining geometries in a semiconductor wafer in a processing chamber, the method comprising:
forming a reusable refractory coated laminar mask by
defining geometries in a laminar mask substrate corresponding to the geometries to be defined in the semiconductor wafer,
forming apertures through the laminar mask substrate, and
forming a layer of refractory material over at least one surface of the laminar mask substrate;
positioning the reusable refractory coated laminar mask over the semiconductor wafer so that the reusable refractory coated laminar is supported parallel to and at a distance from the semiconductor wafer;
coupling an RF power source only to the reusable refractory coated laminar mask for causing ions to be accelerated through the apertures therein; and
treating the semiconductor wafer through the apertures in the reusable refractory coated laminar mask.
12. A method according to claim 11 , wherein the layer of refractory material comprises at least one of yttrium oxide, carbon, silicon oxide and tungsten.
13. A method according to claim 11 , further comprising controlling a temperature of the reusable refractory coated laminar mask for preserving a one-to-one magnification ratio of transfer of the geometries to the semiconductor wafer.
14. A method according to claim 11 , wherein the laminar mask substrate has a thickness in a range of about 30 to 60 μm.
15. A method according to claim 11 , wherein the layer of plasma resistant refractory material has a thickness in a range of about 2 to 10 μm.
16. A method according to claim 11 , wherein the treating comprises a dry etching of at least a top layer of the semiconductor wafer.
17. A method according to claim 11 , wherein the treating comprises at least one of plasma etching and ion etching.
18. A method according to claim 11 , wherein the laminar mask substrate comprises an electrically conductive laminar mask substrate.
19. A method according to claim 18 , wherein the electrically conductive laminar mask substrate comprises at least one of silicon, carbon, copper and gold.