Micromirror array device with compliant adhesive
View Patent ↗A microstructure is packaged with a device substrate of the microstructure being attached to a package substrate. For dissipating possible deformation of the microstructure, which may result in device failure or quality degradation of the microstructure, an adhesive material comprising a compliant adhesive component is applied and positioned between the device substrate and package substrate.
1. A packaged device, comprising:
a microstructure device having a device substrate;
a package substrate on which the microstructure device is attached; and
an adhesive layer disposed between the device substrate and the package substrate for bonding the two substrates, wherein the adhesive layer comprises a adhesive component having a modulii of 2 GPa or lower.
2. The packaged device of claim 1 , wherein the microstructure comprises an array of deflectable reflective micromirrors.
3. The packaged device of claim 2 , wherein the adhesive component has a modulus of 0.5 GPa or lower.
4. The packaged device of claim 2 , wherein the adhesive component has a thermo-conductivity of 0.5 W/m/K or higher.
5. The packaged device of claim 2 , wherein the adhesive component has a thermo-conductivity of 2 W/m/K or higher.
6. The packaged device of claim 2 , wherein the adhesive component has the Young's modulus of 1 GPa or less.
7. The packaged device of claim 2 , wherein the adhesive layer is a thermoplastic.
8. The packaged device of claim 2 , wherein the adhesive layer is a silicone polymer.
9. The packaged device of claim 2 , wherein the adhesive layer is an epoxy.
10. The packaged device of claim 2 , wherein the adhesive layer further comprises a filler that is electrically conductive.
11. The packaged device of claim 10 , wherein the filler comprises a material selected from Ag, AlN, BN, Au, C, C filbers or nanotubes.
12. The packaged device of claim 11 , wherein the filler comprises Au.
13. The packaged device of claim 11 , wherein the filler comprises Ag.
14. The packaged device of claim 11 , wherein the filler comprises BN.
15. The packaged device of claim 11 , wherein the filler comprises C.
16. The packaged device of claim 11 , wherein the filler comprises AlN.
17. The packaged device of claim 10 , wherein the adhesive material is a ring around the perimeter of the device substrate.
18. The packaged device of claim 17 , further comprising:
a layer of water within the ring.
19. The packaged device of claim 2 , further comprising:
an insert plate positioned between the device package and device package.
20. The packaged device of claim 19 , wherein the adhesive layer is below the device package; the insert plate is below the adhesive layer; and the package substrate is below the insert plate.
21. The packaged device of claim 20 , further comprising:
another adhesive layer between the insert plate and the package substrate.
22. The packaged device of claim 2 , wherein the adhesive layer is a continuous film that directly bonding the device substrate to the package substrate.
23. The packaged device of claim 2 , wherein the adhesive layer comprises a plurality of discrete segments each of which directly bonds the device substrate to the package substrate.
24. The packaged device of claim 19 , wherein the insert plate is a silicon plate.
25. The packaged device of claim 2 , further comprising:
a package cover that is bonded to the package substrate with the micromirror array device being sealed within a space between the package cover and the package substrate.
26. The packaged device of claim 25 , wherein the package cover is hermetically bonded to the package substrate.
27. The packaged device of claim 25 , wherein the package cover is not hermetically bonded to the package substrate.
28. The packaged device of claim 25 , wherein the package substrate comprises a cavity in which the micromirror array device is positioned.
29. The packaged device of claim 25 , wherein the package substrate is a flat plate that is bonded to the package cover through spacer.
30. The packaged device of claim 1 , further comprises: a gutter.
31. The packaged device of claim 1 , further comprises: a lubricant.
32. The packaged device of claim 1 , wherein the package substrate further comprises an integral heater for producing localized heat.
33. The packaged device of claim 1 , wherein the device substrate is a silicon substrate.
34. The packaged device of claim 1 , wherein the package substrate is ceramic.
35. The packaged device of claim 1 , wherein the adhesive comprises an organic adhesive material.
36. A method of packaging a microstructure device having a device substrate with a package having a package substrate, comprising:
preparing an adhesive material comprising a adhesive component having a modulus of 2 GPa or lower;
depositing the prepared adhesive material to either one or both of the device substrate and the package substrate; and
bonding the device substrate to the package substrate with the deposited adhesive material.
37. The method of claim 36 , wherein the microstructure comprises an array of deflectable reflective micromirrors.
38. The method of claim 37 , wherein the adhesive component has a modulus of 0.5 GPa or lower.
39. The method of claim 37 , wherein the adhesive component has a thermo-conductivity of 0.5 W/m/K or higher.
40. The method of claim 37 , wherein the adhesive component has a thermo-conductivity of 2 W/m/K or higher.
41. The method of claim 37 , wherein the adhesive component has the Young's modulus of 1 GPa or less.
42. The method of claim 37 , wherein the adhesive layer is a thermoplastic.
43. The method of claim 37 , wherein the adhesive layer is a silicone polymer.
44. The method of claim 37 , wherein the adhesive layer is an epoxy.
45. The method of claim 37 , wherein the adhesive layer further comprises a filler that comprises a material selected from Ag, AlN, BN, Au, C, C filbers or nanotubes.
46. The method of claim 36 , further comprising: a gutter.
47. The method of claim 36 , further comprising: a lubricant.
48. The method of claim 36 , wherein the package substrate further comprises an integral heater for producing localized heat.
49. A spatial light modulator, comprising:
an array of microstructure devices having a device substrate;
a package substrate on which the microstructure device is attached; and
an adhesive layer disposed between the device substrate and the package substrate for bonding the two substrates, wherein the adhesive layer comprises a adhesive component having a modulii of 2 GPa or lower.
50. The spatial light modulator of claim 49 , wherein the adhesive component has a modulus of 0.5 GPa or lower.
51. The spatial light modulator of claim 49 , wherein the adhesive component has a thermo-conductivity of 0.5 W/m/K or higher.
52. The spatial light modulator of claim 51 , wherein the adhesive component has a thermo-conductivity of 2 W/m/K or higher.
53. The spatial light modulator of claim 51 , wherein the adhesive component has the Young's modulus of 1 GPa or less.
54. The spatial light modulator of claim 49 , wherein the adhesive layer is an organic material.
55. The spatial light modulator of claim 49 , wherein the adhesive layer is a thermoplastic.
56. The spatial light modulator of claim 49 , wherein the adhesive layer is a silicone polymer.
57. The spatial light modulator of claim 49 , wherein the adhesive layer is an epoxy.