Mode size converter for a planar waveguide
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
1 . A method of forming a tapered waveguide, comprising:
depositing a core layer over a substrate with a shadow mask; and
patterning the core layer to form a tapered waveguide.
2 . The method of claim 1 , wherein depositing the core layer includes depositing an active core layer.
3 . The method of claim 1 , wherein depositing the core layer includes depositing a passive core layer.
4 . The method of claim 1 , further including depositing an uncercladding layer between the substrate and the core layer.
5 . The method of claim 1 , further including depositing another core layer between the core layer and the substrate.
6 . The method of claim 1 , wherein the shadow mask is positioned to adjust the taper of the tapered waveguide.
7 . The method of claim 1 , wherein depositing a core layer includes depositing a core layer with physical vapor deposition.
8 . The method of claim 1 , wherein depositing a core layer includes depositing a core layer by sputtering.