Method of fabricating a thin film transistor with multiple gates using metal induced lateral crystallization
View Patent ↗A thin film transistor with multiple gates using an MILC process which is capable of materializing multiple gates without increasing dimensions and a method thereof. The thin film transistor has a semiconductor layer which is formed on a insulating substrate in a zigzag shape; and a gate electrode which is equipped with one or more slots intersecting with the semiconductor layer, the semiconductor layer includes two or more body parts intersecting with the gate electrode; and one or more connection parts connecting each neighboring body part, wherein a part overlapping the semiconductor layer in the gate electrode acts as a multiple gate, and MILC surfaces are formed at a part which does not intersect with the gate electrode in the semiconductor layer.
1. A method of fabricating a thin film transistor with multiple gates using the MILC process comprising:
forming a multi-semiconductor layer comprising neighboring polycrystalline silicon films using the MILC process on an insulating substrate;
forming a gate electrode equipped with one or more slots intersecting with the multi-semiconductor layer;
forming contact holes so that each of two edges of the multi-semiconductor layer are exposed;
simultaneously forming source/drain electrodes contacting one exposed side edge of the multi-semiconductor layer; and
forming a link to connect the other exposed side edge of the multi-semiconductor layer with a multi-semiconductor layer to be contacted.
2. The method according to claim 1 , further comprising:
forming a buffer layer;
forming an amorphous silicon layer on the buffer layer;
forming a blocking layer on the amorphous silicon layer;
forming a photosensitive film on the blocking layer;
forming a first pattern layer of the blocking layer using the photosensitive film as a mask;
reflowing the photosensitive film so as to completely cover the patterned blocking layer;
depositing a metal layer;
removing the photosensitive film; and
crystallizing the amorphous silicon film using the MILC process.